The The Gas-Sensitive Properties of Tin Dioxide Films
Abstract
This study investigates the fabrication and performance of SnO2 thin films for gas sensing applications, utilizing a deposition method at 2 bar pressure and 8 ml/min flow rate. A multilayer structure was developed, comprising 14 layers, each with a thickness of 250 nm, optimized for sensitivity and stability. The gas sensor, featuring a film heater and sensitive elements doped with a 1% silicon additive, demonstrated a wide operational temperature range (20-370 °C). Characterization of resistance changes revealed significant hysteresis before isothermal annealing, with resistance values stabilizing after prolonged exposure to 370 °C. Post-annealing, the sensor exhibited three orders of magnitude higher resistance, indicating improved stability and electronic transport properties. Doping with a 1N AgNO3 solution significantly enhanced sensitivity to ammonia, with a detection threshold of 500 ppm, while sensitivity to alcohol vapors decreased, indicating selectivity. Experimental results confirm that local doping and thermal treatment effectively enhance the metrological characteristics of SnO2-based sensors, making them suitable for detecting toxic gases.
Downloads
References
H.C. Wang, and M.J. Yang, “Fast response thin film SnО2 gas sensors operating at room temperature,” Sensors and Actuators В: Chemical, 119(2), 380–383 (2006). https://doi.org/10.1016/j.snb.2005.12.037
A. Mirzaei, et.al., “Resistive gas sensors based on metal-oxide nanowires,” J. Appl. Phys. 126, 241102 (2019). https://doi.org/10.1063/1.5118805
G. Velmathi, S. Mohan, and Rabinder Henry, “Analysis and Review of Tin Oxide-Based Chemoresistive Gas Sensor,” IETE Technical Review, (2015). https://doi.org/10.1080/02564602.2015.1080603
S.Z. Zainabidinov, A.Y. Boboev, N.Y. Yunusaliyev, and J.N. Usmonov, “An optimized ultrasonic spray pyrolysis device for the production of metal oxide films and their morfology,” East Eur. J. Phys. 3, 293 (2024), https://doi.org/10.26565/2312-4334-2024-3-30
A.S. Saidov, S.Z. Zainabidinov, M.U. Kalanov, A.Y. Boboev, and B.R. Kutlimurotov, “Peculiarities of photosensitivity of n-(GaAs)-p-(GaAs)1–x–y(ZnSe)x(Ge2)y structures with quantum dots,” Applied Solar Energy, 51(3), 206–208 (2015). https://doi.org/10.3103/S0003701X15030111
S. Zainabidinov, A.Y. Boboev, and N.Y. Yunusaliyev, “Effect of γ-irradiation on structure and electrophysical properties of S-doped ZnO films,” East European Journal of Physics, (2), 321–326 (2024). https://doi.org/10.26565/2312-4334-2024-2-37
P. Patil, R. Kawar, S. Tanay, D. Amalnerkar, and P.S. Chigare, “Effect of substrate temperature on structural, electrical and optical properties of sprayed tin oxide (SnO2) thin films,” Ceramics International, 29, 725-734 (2003). https://doi.org/10.1016/S0272-8842(02)00224-9
T. Kobayashi, et al., “Process of crystallization in thin amorphous tin oxide film,” Journal of Crystal Growth, 243(1), 143-150 (2002). https://doi.org/10.1016/S0022-0248(02)01445-8
F.A. Akgul, et al., “Structural and electronic properties of SnO2,” Journal of Alloys and Compounds, 579, 50–56 (2013). http://dx.doi.org/10.1016/j.jallcom.2013.05.057
S.Z. Zaynabidinov, Sh.U. Yuldashev, A.Y. Boboev, and N.Y. Yunusaliyev, “X-ray diffraction and electron microscopic studies of the ZnO metal oxide films obtained by the ultrasonic spray pyrolysis method,” Herald of the Bauman Moscow State Technical University, Series Natural Sciences, 112(1), 78–92. (2024). https://doi.org/10.18698/1812-3368-2024-1-78-92
A. Aqilah, N.M. Sin, M. Mamat, M. Hussin, M. Abdullah, and N. Asli, “Effect of Annealing Temperature on the Structural Properties and Performance of ZnO/SnO2 Nanostructure of AZO-Based Humidity Sensor,” Nano Hybrids and Composites, 45, 53 (2024). https://doi.org/10.4028/p-QlV6Q7
U.O. Kutliev, M.K. Karimov, F.O. Kuryozov, and K.U. Otabaeva, “Analysis of InGaP(001) surface by the low energy ion scattering spectroscopy,” Journal of Physics: Conference Series, 1889(2), 022063 (2021). https://doi.org/10.1088/1742-6596/1889/2/022063
M.K. Karimov, U.O. Kutliev, S.B. Bobojonova, and K.U. Otabaeva, “Investigation of Angular Spectrum of Scattered Inert Gas Ions from the InGaP (001) Surface,” Physics and Chemistry of Solid State, 22(4), 742–745 (2021). https://doi.org/10.15330/pcss.22.4.742-745
A. Ibtisam, L. Doowon, Ch. Myoungsu, and H.D. Kim, “Advanced recovery and enhanced humidity tolerance of CNTs gas sensor using a filament heater,” Chemical Engineering Journal, 496, 154014 (2024). https://doi.org/10.1016/j.cej.2024.154014
V.E. Bochenlov, and G.B. Sergeev, “Sensitivity, Selectivity, and Stability of Gas-Sensitive Metal-Oxide Nanostructures,” in: Metal oxide nanostructures and their applications, vol. 3. (American Scientific, Publishers, USA, 2010), pp. 31–52.
U.O. Kutliev, M.U. Otabaev, and M.K. Karimov, “Investigation Ne ions scattering from the stepped InP(001)<ī10> surface,” Journal of Physics: Conference Series, 2388(1), 012092 (2022). https://doi.org/10.1088/1742-6596/2388/1/012092
Sh.B. Utamuradova, Sh.Kh. Daliyev, J.J. Khamdamov, Kh.J. Matchonov, and Kh.Y. Utemuratova, “Research of the Impact of Silicon Doping with Holmium on its Structure and Properties Using Raman Scattering Spectroscopy Methods,” East Eur. J. Phys. (2), 274 (2024). https://doi.org/10.26565/2312-4334-2024-2-28
S. Zainabidinov, Sh.Kh. Yulchiev, A.Y. Boboev, B.D. Gulomov, and N.Y. Yunusaliyev, “Structural properties of Al-doped ZnO films,” East Eur. J. Phys. (3), 282 (2024). https://doi.org/10.26565/2312-4334-2024-3-28
Copyright (c) 2024 Nuritdin Y. Yunusaliyev
This work is licensed under a Creative Commons Attribution 4.0 International License.
Authors who publish with this journal agree to the following terms:
- Authors retain copyright and grant the journal right of first publication with the work simultaneously licensed under a Creative Commons Attribution License that allows others to share the work with an acknowledgment of the work's authorship and initial publication in this journal.
- Authors are able to enter into separate, additional contractual arrangements for the non-exclusive distribution of the journal's published version of the work (e.g., post it to an institutional repository or publish it in a book), with an acknowledgment of its initial publication in this journal.
- Authors are permitted and encouraged to post their work online (e.g., in institutional repositories or on their website) prior to and during the submission process, as it can lead to productive exchanges, as well as earlier and greater citation of published work (See The Effect of Open Access).
