An Optimized Ultrasonic Spray Pyrolysis Device for The Production of Metal Oxide Films and Their Morfology

  • Sirajidin S. Zainabidinov Andijan State University named after Z.M. Babur, Andijan, Uzbekistan https://orcid.org/0000-0003-2943-5844
  • Akramjon Y. Boboev Andijan State University named after Z.M. Babur, Andijan, Uzbekistan; Institute of Semiconductor Physics and Microelectronics, National University of Uzbekistan, Tashkent, Uzbekistan https://orcid.org/0000-0002-3963-708X
  • Nuritdin Y. Yunusaliyev Andijan State University named after Z.M. Babur, Andijan, Uzbekistan https://orcid.org/0000-0003-3766-5420
  • Jakhongir N. Usmonov Andijan State University named after Z.M. Babur, Andijan, Uzbekistan https://orcid.org/0000-0002-7243-4938
DOI: https://doi.org/10.26565/2312-4334-2024-3-30
Keywords: Film, Space group, Subcrystal, Nanocrystal, Quantum size effect, Lattice parameter, Transparent electronics, Band gap

Abstract

In this work, we developed an optimized ultrasonic spray pyrolysis device for obtaining metal oxide films. The key benefit of this facility lies in its cost-effectiveness and its ability to consistently coat extensive surfaces without sacrificing the integrity of the semi-conductive films, thus streamlining the manufacturing process of semiconductor films. The resulting films exhibit the following attributes: the thickness of the deposited layer is approximately 400 nm, while the diameters of ZnO1-xSx nanocrystals range from 50 to 200 nm, oriented perpendicular to the crystallographic orientation (111). In the production of nanorods, the average height is estimated to be approximately 30-50 nm, with a density of 2.9×10¹¹ cm⁻² being indicated.

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Published
2024-09-02
Cited
How to Cite
Zainabidinov, S. S., Boboev, A. Y., Yunusaliyev, N. Y., & Usmonov, J. N. (2024). An Optimized Ultrasonic Spray Pyrolysis Device for The Production of Metal Oxide Films and Their Morfology. East European Journal of Physics, (3), 293-297. https://doi.org/10.26565/2312-4334-2024-3-30
Issue
No. 3 (2024): East European Journal of Physics
Section
Original Papers

Copyright (c) 2024 Sirajidin S. Zainabidinov, Akramjon Y. Boboev, Nuritdin Y. Yunusaliyev, Jakhongir N. Usmonov

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