Synthesis of high-quality diamond coatings by methods of activated chemical vapor deposition
Keywords:
diamond coatings, chemical vapor deposition, the coating growth rate, defect structure of coatings
Abstract
Literature review of some features and common mechanism of processes of diamond coatings synthesis by a chemical vapor deposition have been presented. Theoretical and experimental results of study of high-quality diamond coatings synthesis with high deposition growth rates have been given. On the basis of the analysis of the given data the most perspective directions of further developments of technology of industrial production of high-quality diamond materials are determined.
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References
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Varnin V.P. Rol’ termodinamicheskih i kineticheskih faktorov pri roste almaza iz gazovoj fazy //Tr. 1-go mezhdunar. sem. po almaznym plenkam. Tehnika sredstv svyazi. Seriya “tehnologiya proizvodstva i oborudovanie”. − 1991. − Vyp. 4. − S. 70-91.
Samojlovich M.I., Belyanin A.F. Almaznye i almazopodobnye uglerodnye plenki: formirovanie i stroenie//Sb. dokl. 15-go mezhdunar. simp. “Tonkie plenki v optike i elektronike”. Almaznye plenki i plenki rodstvennyh materialov (Harkov). − 2003. − S. 6-37.
Goodwin D.G. Scaling laws for diamond chemical-vapor deposition. I. Diamond surface chemistry//J. Appl. Phys. − 1993. − Vol. 74, No. 11. − P. 6888-6894.
Silva F., Achard J., Brinza O., Bonnin X., Hassouni K., Anthonis A., De Corte K., Barjon J. High quality, large surface area, homoepitaxial MPA CVD diamond growth//Diamond and Related Materials. − 2009. − Vol. 18. − P. 683-697.
Karpuhina T., Cherednichenko A., Bujlov L., Aleksenko A.E., Belyanin A.F. Issledovanie defektnyh centrov i primesej v polikristallicheskih plenkah almaza//Tr. 1-go mezhdunar. sem. po almaznym plenkam. Tehnika sredstv svyazi. Seriya “tehnologiya proizvodstva i oborudovani”. − 1991. − Vyp. 4. − S. 40-50.
Vyrovec I.I., Gricyna V.I., Dudnik S.F., Kutnij V.E., Opalev O.A., Rybka A.S., Strelnickij V.E. Issledovanie vliyaniya parametrov sinteza almaznyh pokrytij na skorost ih rosta i velichinu udelnogo elektricheskogo soprotivleniya//Voprosy atomnoj nauki i tehniki, Seriya: Fizika radiacionnyh povrezhdenij i radiacionnoe materialovedenie. − 2010. − T. 95, № 1. − S. 104-107.
Baik Y.J., Lee J.K., Lee W.S., Eun K.Y. Large area deposition of thick diamond film by directcurrent PACVD//Thin Solid Films. − 1999. − Vol. 341. P. 202-206.
Ermakova O.N., Polyakov V.I., Ermakov M.G., Perov P.I., Lazareva O.I., Sokolina G.A., Spitsin B.S. Electrical characteristic frequency dispersion of diamond polycrystalline films//Diamond and Related Materials. − 1993. − Vol. 2. − P. 1336-1340.
Sokolina G.A., Bujlov L.L., Teremeckaya I.G., Lazareva I.O. Vliyanie sostava rostovoj gazovoj fazy na ‘elektricheskie svojstva almaznyh plenok //Tr. 1-go mezhdunar. sem. po almaznym plenkam. Tehnika sredstv svyazi. Seriya ”tehnologiya proizvodstva i oborudovanie”. − 1991. − Vyp. 4. − S. 144-147.
Viharev A.L., Gorbachev A.M., Muchnikov A.B., Radischev D.B. Issledovaniya osazhdeniya tonkih monokristallicheskih almaznyh plenok v plazme SVCh razryada//Sb. dokl. XIII Mezhdunar. nauch.-tehn. konf. “Vysokie tehnologii v promyshlennosti Rossii”. XX Mezhdunar. simp. “Tonkie plenki v elektronike”. − 2008. − S. 374-379.
Toyota H., Nomura S., Mukasa S., Takahashi Y., Okuda S. Diamond synthesis by plasma chemical vapor deposition in liquid and gas//Diamond and Related Materials.−2010.− Vol. 19. − P. 418-422.
Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno, Shin-ichi Shikata. Numerical and experimental studies of high growth-rate over area with 1-inch in diameter under moderate inputpower by using MWPCVD//Diamond and Related Materials.− 2008. − Vol. 17. − P. 1062-1066.
Tallaire A., Achard J., Silva F., Gicquel A. Effect of increasing the microwave density in both continuous and pulsed wave mode on the growth of monocrystalline diamond films//Phys. stat. sol., (a). − 2005. − Vol. 202, No. 11. − P. 2059-2065.
Muchnikov A., Vikharev A., Gorbachev A., Radishev D. Comparative study of homoepitaxial single crystal diamond growth at continuous and pulsed mode of MPACVD reactor operation// Diamond and Related Materials. − 2011. − Vol. 20. − P. 1225-1228.
Tokuyuki Teraji, Mitsuhiro Hamada, Hideki Wada, Michinori Yamamoto, Kazuya Arima, Toshimichi Ito. High rate growth and electrical/optical properties of high- quality homoepitaxial diamond (100) films//Diamond and Related Materials. – 2005. − Vol. 14. − P. 255-260.
Hassan Chatei, Jamal Bougdira, Mishel Remy, Patrick Alnot, Christian Bruch, Jan K. Kruger. Effect of nitrogen concentration on plasma reactivity and diamond growth in H2-CH4-N2 microwave discharge//Diamond and Related Materials. − 1997. − Vol. 6. − P. 107-119.
Hag S., Tunnicliffe D.L., Savage J.A. Optical characterization of textured microwave CVD diamond// Diamond and Related Materials. − 1994. − Vol. 3. − P. 593-597.
Jentsch H.-G., Rosiwal S.M., Singer R.F. High growth rate and high quality CVD diamond growth// Proceedings of the sixth applied diamond conference/second frontier carbon technology joint conference (ADC/FCT 2001) NASA/CP2001-210948. − 2001. − P. 333.
Vyrovec I.I., Gricyna V.I., Dudnik S.F., Kutnij V.E., Opalev O.A., Rybka A.S., Reshetnyak E.N., Strelnickij V.E. Osobennosti osazhdeniya polikristallicheskih almaznyh plenok dlya detektorov ioniziruyuschego izlucheniya//Tr. 18 Mezhdunar. кonf. po fizike radiacionnyh yavlenij i radiacionnomu materialovedeniyu (Alushta, Krym). − 2008. − S. 374-375.
Qi Liang, Chih-shiue Yan, Yufei Meng, Joseph Lai, Szczesny Krasnicki, Ho-kwang Mao, Russell J. Hemley. Recent advances in high-growth rate single-crystal CVD diamond//Diamond and Related Materials. − 2009. – Vol. 18. − P. 698703.
Mokuno Y., Chayahara A., Soda Y., Horino Y., Fujimori N. Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD//Diamond and Related Materials.− 2005. − Vol. 14. − P. 1743-1746.
Tallaire A., Achard J., Silva F., Sussmann R.S., Gicquel A. Homoepitaxial deposition of high-quality thick diamond films: effect of growth parameters//Diamond and Related Materialsyu. − 2005. − Vol. 14. − P. 249-254.
Xue-Gui Qi, Ze-Shao Chen, Hong Xu. Construction and analysis of C-H-N-phase diagram for diamond chemical vapor deposition by simulation of gas-phase chemistry//Surface and Coatings Technology. − 2006. − Vol. 200. − P. 5268-5276.
Van Regemorter T., Larsson K. Effect of substitutional N on the diamond CVD growth process: A theoretical approach//Diamond and Related Materials. − 2008. − Vol. 17. − P. 1076-1079.
Zoya Mehmood Shah, Alison Mainwood. A theoretical study of the effect of nitrogen, boron and phosphorus impurities on the growth and morphology of diamond surfaces//Diamond and Related Materials.− 2008. − Vol. 17. − P. 1307-1310.
Published
2017-07-28
How to Cite
Грицына, В. И., Дудник, С. Ф., Кошевой, К. И., Опалев, О. А., & Стрельницкий, В. Е. (2017). Synthesis of high-quality diamond coatings by methods of activated chemical vapor deposition. Journal of Surface Physics and Engineering, 11(1), 63 - 77. Retrieved from https://periodicals.karazin.ua/pse/article/view/8786
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