Effect of gas phase in the synthesis of nanostructured diamond coatings on their resistivity
Keywords:
diamond coatings, nitrogen doped, nanostructure, specific resistance, gas phase compositionAbstract
Experimental results of study of influence of gas phase composition on nitrogen-doped nanostructured diamond coatings synthesized in glow discharge plasma on their specific resistance have been discussed. It was shown, that due to change of gas phase composition the specific resistance of nanostructured diamond coatings can be changed by its value more than to 3 orders.
Downloads
Published
2017-07-28
Issue
Section
Статті
License
У відповідності з типовим шаблоном.How to Cite
Effect of gas phase in the synthesis of nanostructured diamond coatings on their resistivity. (2017). Journal of Surface Physics and Engineering, 11(4), 338-344. https://periodicals.karazin.ua/pse/article/view/8861