Evolution of structure and mechanism of thermal decomposition of C/SI multilayers
Keywords:
nanoscale compositions, extreme ultraviolet, multilayer optics, structural and phase transformations, layer interaction, thermostability
Abstract
Structure and composition of C/Si periodical multilayers were investigated by means of lowangle Xray diffraction, transmission electron microscopy and Raman spectroscopy at temperatures within 50—1050 °C range. In asdeposited state C/Si multilayer presents amorphous carbon and silicon layers divided by amorphous intermixing layers of different density. As the temperature increases, multilayer period changes as a result of increase of intermixing layers and carbon graphitization. At 700 °C silicon crystallization begins. At 800 °C crystalline SiC of cubic modification forms on basis of crystalline silicon. At 900—1000 °C destruction of multilayer periodical structure takes place.
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References
Soufli R., Spiller E., Windt D. L., Robinson J. C., Gullikson E. M., Marcos L. R., Fernández-Perea M., Baker S. L., Aquila A. L., Dollar F. J., Méndez J. A., Larruquert J. I., Golub L., Boerner P. In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory // Proc. SPIE. — 2012. — Vol. 8443. — P. 84433C1 — 84433C12.
Suman M., Pelizzo M. G., Windt D. L., Nicolosi P. Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging // Applied Optics. — 2009. — Vol. 48, No. 29. — P. 5432 — 5437.
Wülser J.-P., Lemen J. R., Tarbell T. D., Wolfson C. J., Cannon J. C., Carpenter B. A., Duncan D. W., Gradwohl G. S., Meyer S. B., Moore A. S., Navarro R. L, Pearson J. D., Rossi G. R., Springer L. A., Howard R. A., Moses J. D., Newmark J. S., Delaboudinière J.-P., Artzner G., Auchère F., Bougnet M., Bouyries P., Bridou F., Clotaire J.-Y., Colas G., Delmotte F., Jerome A., Lamare M., Mercier R., Mullot M., Ravet M.-F., Song X., Bothmer V., Deutsch W. EUVI: the STEREO-SECCHI extreme ultraviolet imager // Proc. SPIE. — 2004. — Vol. 5171. — P. 111 — 122.
Taguchi M., Fukunishi H., Watanabe S., Okano S.,Takahashi Y., Kawahara T. D., Ultraviolet imaging spectrometer (UVS) experiment on board the NOZOMI spacecraft: Instrumentation and initial results // Earth Planets Space. — 2000. — Vol. 52. — P. 49 — 60.
Yoshikawa I., Murachi T., Kameda S., Yamazaki A., Okano S., Nakamura M. Development of an extreme ultraviolet imaging spectrometer for the Mercury mission // Proc. SPIE. — 2004. — Vol. 5193 — P. 164 — 171.
Spiller E. Soft X-ray Optics. — Washington: SPIE Optical Engineering Press, 1994 — 290 p.
Maury H., Jonnard P., Le Guen K., Andre J.-M., Wang Z., Zhu J., Dong J., Zhang Z., Bridou F., Delmotte F., Hecquet C., Mahne N., Giglia A., Nannarone S. Thermal cycles, interface chemistry and optical performance of Mg/ SiC multilayers // The European Physical Journal B. — 2008. — Vol. 64. — P. 193—199.
Zhu J., Zhou S., Li H., Huang Q., Jiang L., Wang F., Zhang Z., Wang Z., Zhou H., Huo T. Mg-based multilayers and their thermal stabilities for EUV range // Proc.SPIE. — 2012. — Vol. 8168. — P. 81681C1—81681C7.
Le Guen K., Hu M.-H., Andre J.-M., Jonnard P., Zhou S. K., Li H. Ch., Zhu J. T., Wang Z. S., Meny C. Development and Interfacial Characterization of Co/Mg Periodic Multilayers for the EUV Range // The Journal of Physical Chemistry С. — 2010. — Vol. 114. — P. 6484—6490.
Zhong Q., Zhang Z., Li W., Zhu J., Wang Z., Jonnard P., Le Guen. P., Yuan Y., Andre J.-M., Zhou H., Huo T. Al/Zr multilayer mirror and its thermal stability for EUV application // Journal of Physics: Conference Series. — 2013. — Vol. 425. — P. 152010.
Windt D. L., Bellotti J. A. Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications // Applied Optics. — 2009. — Vol. 48, No. 26. — P. 4932—4941.
Windt D. L., Donguy S., Seely J., Kjornrattanawanich B. Experimental comparison of extreme-ultraviolet multilayers for solar physics //Applied Optics. — 2004. — Vol. 43. — P. 1835—1848.
Hansen M., Anderko K. Constitution of binary alloys. — New York: McGraw-Hill, 1991. — 1305 p.
Журавель И. А., Бугаев Е. А., Воронов Д. Л., Кондратенко В. В. Изменение структуры и оптических свойств многослойных рентгеновских зеркал C/Si при нагреве // Металлофизика и новейшие технологии. — 2013. — Т. 35, № 7. — С. 987—997.
Barbee T. W. Multilayers for X-ray Optics // Optical Engineering. — 1986. — Vol. 25, No. 8. — P. 899—915.
Attwood D. T., Henke B. L. Low energy X-ray diagnostics New York: American Institute of Physics, 1981. — 394 p.
Jackson J. D. Classical electrodynamics, 2nd edn. — New York : John Wiley and Sons, 1975. — 880 p.
Zhuravel I. O., Bugayev Ye. A., Konotopsky L. E., Zubarev E. M., Sevryukova V. A., Kondratenko V. V. Structural transformations in C/Si multilayer after annealing // Physical surface engineering — 2012. — Vol. 10, No. 3. — P. 314—318.
Kondratenko V. V. Thermal stability of multilayer X-ray mirrors for wavelength range 4.47 < λ < 6.76 nm // Functional Materials. — 1997. — Vol. 4, No. 4. — P. 481—486.
Бугаев Е. А., Зубарев Е. Н., Кондратенко В. В., Федоренко А. И. Рентгеновские зеркала повышенной термической стойкости для диапазона длин волн 4,47 < λ < 6,76 нм // Национальная конференция по применению рентгеновского и синхротронного излучений, нейтронов и электронов для исследования материалов. Сборник докладов. (Дубна). — 1997. — Т. 2. — С. 268—274.
Ferrari A. C., Robertson J. Interpretation of Raman spectra of disordered and amorphous carbon // Physical Review B. — 2000. — Vol. 61, No. 20. — P. 14095—14107.
Voronov D. L., Zubarev E. N., Kondratenko V. V., Pershin Yu. P., Sevryukova V. A., Bugayev Ye. A. Study of fast diffusion species in Sc/Si multilayers by W-based marker analysis // Thin Solid Films. — 2006. — Vol. 513, No. 1—2. — P. 152—158.
Charai A., Boulesteix C. Visualization and study of the shape and size of very small coherent precipitates by a phase contrast method // Physica Status Solidi (a). — 1983. — Vol. 80, No. 4. — P. 333 — 341.
Chung C. K., Wu B. H., Chen T. S., Peng C. C., Lai C. W. Thickness effect on the formation of SiC nanoparticles in sandwiched Si/C/ Si and C/Si multilayers // Thin Solid Films. — 2009. — Vol. 517. — P. 5867—5871.
Chung C. K., Wu B. H. Thermally induced formation of SiC nanoparticles from Si/C/Si multilayers deposited by ultra-high-vacuum ion beam sputtering // Nanotechnology. — 2006. — Vol. 17. — P. 3129—3133.
Suman M., Pelizzo M. G., Windt D. L., Nicolosi P. Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging // Applied Optics. — 2009. — Vol. 48, No. 29. — P. 5432 — 5437.
Wülser J.-P., Lemen J. R., Tarbell T. D., Wolfson C. J., Cannon J. C., Carpenter B. A., Duncan D. W., Gradwohl G. S., Meyer S. B., Moore A. S., Navarro R. L, Pearson J. D., Rossi G. R., Springer L. A., Howard R. A., Moses J. D., Newmark J. S., Delaboudinière J.-P., Artzner G., Auchère F., Bougnet M., Bouyries P., Bridou F., Clotaire J.-Y., Colas G., Delmotte F., Jerome A., Lamare M., Mercier R., Mullot M., Ravet M.-F., Song X., Bothmer V., Deutsch W. EUVI: the STEREO-SECCHI extreme ultraviolet imager // Proc. SPIE. — 2004. — Vol. 5171. — P. 111 — 122.
Taguchi M., Fukunishi H., Watanabe S., Okano S.,Takahashi Y., Kawahara T. D., Ultraviolet imaging spectrometer (UVS) experiment on board the NOZOMI spacecraft: Instrumentation and initial results // Earth Planets Space. — 2000. — Vol. 52. — P. 49 — 60.
Yoshikawa I., Murachi T., Kameda S., Yamazaki A., Okano S., Nakamura M. Development of an extreme ultraviolet imaging spectrometer for the Mercury mission // Proc. SPIE. — 2004. — Vol. 5193 — P. 164 — 171.
Spiller E. Soft X-ray Optics. — Washington: SPIE Optical Engineering Press, 1994 — 290 p.
Maury H., Jonnard P., Le Guen K., Andre J.-M., Wang Z., Zhu J., Dong J., Zhang Z., Bridou F., Delmotte F., Hecquet C., Mahne N., Giglia A., Nannarone S. Thermal cycles, interface chemistry and optical performance of Mg/ SiC multilayers // The European Physical Journal B. — 2008. — Vol. 64. — P. 193—199.
Zhu J., Zhou S., Li H., Huang Q., Jiang L., Wang F., Zhang Z., Wang Z., Zhou H., Huo T. Mg-based multilayers and their thermal stabilities for EUV range // Proc.SPIE. — 2012. — Vol. 8168. — P. 81681C1—81681C7.
Le Guen K., Hu M.-H., Andre J.-M., Jonnard P., Zhou S. K., Li H. Ch., Zhu J. T., Wang Z. S., Meny C. Development and Interfacial Characterization of Co/Mg Periodic Multilayers for the EUV Range // The Journal of Physical Chemistry С. — 2010. — Vol. 114. — P. 6484—6490.
Zhong Q., Zhang Z., Li W., Zhu J., Wang Z., Jonnard P., Le Guen. P., Yuan Y., Andre J.-M., Zhou H., Huo T. Al/Zr multilayer mirror and its thermal stability for EUV application // Journal of Physics: Conference Series. — 2013. — Vol. 425. — P. 152010.
Windt D. L., Bellotti J. A. Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications // Applied Optics. — 2009. — Vol. 48, No. 26. — P. 4932—4941.
Windt D. L., Donguy S., Seely J., Kjornrattanawanich B. Experimental comparison of extreme-ultraviolet multilayers for solar physics //Applied Optics. — 2004. — Vol. 43. — P. 1835—1848.
Hansen M., Anderko K. Constitution of binary alloys. — New York: McGraw-Hill, 1991. — 1305 p.
Журавель И. А., Бугаев Е. А., Воронов Д. Л., Кондратенко В. В. Изменение структуры и оптических свойств многослойных рентгеновских зеркал C/Si при нагреве // Металлофизика и новейшие технологии. — 2013. — Т. 35, № 7. — С. 987—997.
Barbee T. W. Multilayers for X-ray Optics // Optical Engineering. — 1986. — Vol. 25, No. 8. — P. 899—915.
Attwood D. T., Henke B. L. Low energy X-ray diagnostics New York: American Institute of Physics, 1981. — 394 p.
Jackson J. D. Classical electrodynamics, 2nd edn. — New York : John Wiley and Sons, 1975. — 880 p.
Zhuravel I. O., Bugayev Ye. A., Konotopsky L. E., Zubarev E. M., Sevryukova V. A., Kondratenko V. V. Structural transformations in C/Si multilayer after annealing // Physical surface engineering — 2012. — Vol. 10, No. 3. — P. 314—318.
Kondratenko V. V. Thermal stability of multilayer X-ray mirrors for wavelength range 4.47 < λ < 6.76 nm // Functional Materials. — 1997. — Vol. 4, No. 4. — P. 481—486.
Бугаев Е. А., Зубарев Е. Н., Кондратенко В. В., Федоренко А. И. Рентгеновские зеркала повышенной термической стойкости для диапазона длин волн 4,47 < λ < 6,76 нм // Национальная конференция по применению рентгеновского и синхротронного излучений, нейтронов и электронов для исследования материалов. Сборник докладов. (Дубна). — 1997. — Т. 2. — С. 268—274.
Ferrari A. C., Robertson J. Interpretation of Raman spectra of disordered and amorphous carbon // Physical Review B. — 2000. — Vol. 61, No. 20. — P. 14095—14107.
Voronov D. L., Zubarev E. N., Kondratenko V. V., Pershin Yu. P., Sevryukova V. A., Bugayev Ye. A. Study of fast diffusion species in Sc/Si multilayers by W-based marker analysis // Thin Solid Films. — 2006. — Vol. 513, No. 1—2. — P. 152—158.
Charai A., Boulesteix C. Visualization and study of the shape and size of very small coherent precipitates by a phase contrast method // Physica Status Solidi (a). — 1983. — Vol. 80, No. 4. — P. 333 — 341.
Chung C. K., Wu B. H., Chen T. S., Peng C. C., Lai C. W. Thickness effect on the formation of SiC nanoparticles in sandwiched Si/C/ Si and C/Si multilayers // Thin Solid Films. — 2009. — Vol. 517. — P. 5867—5871.
Chung C. K., Wu B. H. Thermally induced formation of SiC nanoparticles from Si/C/Si multilayers deposited by ultra-high-vacuum ion beam sputtering // Nanotechnology. — 2006. — Vol. 17. — P. 3129—3133.
Published
2017-03-24
How to Cite
Журавель, И. А., Бугаев, Е. А., Пеньков, А. В., Зубарев, Е. Н., Севрюкова, В. А., & Кондратенко, В. В. (2017). Evolution of structure and mechanism of thermal decomposition of C/SI multilayers. Journal of Surface Physics and Engineering, 12(1), 20-30. Retrieved from https://periodicals.karazin.ua/pse/article/view/8161
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