Structure and properties of nitride coatings deposited from filtered vacuum arc plasma generated by evaporation of cromium-aluminum powder cathode
Keywords:
vacuum-arc deposition, powder cathode, filtered plasma, nitride coatings, hardness
Abstract
CrAlN coatings were synthesized by filtered vacuum-arc deposition method using the powder Cr0.5Al0.5 cathode. High hardness (30-36) GPa, low roughness of (40-50) nm, low friction coefficient and high wear durability enable use of these coatings as protective ones. The cathode material was made by hot compaction of chromium and aluminum powder mixtures, its structure and phase composition have been investigated. Hot compacted cathode blank have a structure of aluminum matrix composite of minimal (3-4 %) porosity, whose strength and plasticity is apt to be machined for fabrication the cathode.
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References
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36. Belous V. A., Vasyliev V. V., Goltvyanytsya V. S., Goltvyanytsya S. K. et al. Structure and properties of TiAlYN coatings deposited from filtered vacuum-arc plasma // Surface & Coatings Technology. — 2011. — Vol. 206. — P. 1720–1726.
37. Davis C. A. A simple model for the formation of compressive stress in thin films by ion bombardment // Thin Solid Films. — 1993. — Vol. 226. — P. 30–34.
38. Reshetnyak E. N. Structure and stress state of TiN and Ti0.5–xAl0.5YxN coatings prepared by the PIII&D technique from filtered vacuum-arc plasma // ВАНТ, Серия: Вакуум, чистые материалы, сверхпроводники. — 2014. — № 1 (20). — C. 159–162.
39. Akkaya S. S., Vasyliev V. V., Reshetnyak E. N., Kazmanli K., Solak N., Strel’nitskij V. E., Ürgen M. Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma // Surface & Coatings Technology. — 2013. —Vol. 236. — P. 332–340.
2. Jan Perne. Plastic flow behavior of (Cr, Al)N hard coatings in dependence of strain rate and nanostructure // Thin Solid Films. — 2014. — Vol. 556. — P. 390–394.
3. Knotek O., Atzor M., Barimani A. and Jungblut F. Development of low temperature ternary coatings for high wear resistance // SCT. — 1990. — Vol. 42. — P. 21–28.
4. Knotek O., Löffler F., Scholl H. J., Barimani C. The multisource arc process for depositing ternary Cr- and Ti-based coatings // SCT. — 1994. — Vol. 68–69. — P. 309–313.
5. http: //www.oerlikonbalzerscoating.com/buk/ eng/01-products-services/02-balinit-coatings/ indexW3DnavidW261.php
6. Mayrhofer P. H., Music D., Reeswinkel Th., Fuss H. -G., Schneider J. M. Structure, elastic properties and phase stability of Cr1–xAlxN // Acta Materialia. — 2008. — Vol. 56. — P. 2469–2475.
7. Yukio Makino. Prediction of phase change in pse udobinary transition metal aluminum nitrides by band parameters method // SCT. — 2005. — Vol. — 193. — P. 185–191.
8. Alling B., Karimi A., Abrikosov I. A. Electronic origin of the isostructural decomposition in cubic M1−xAlxN (M = Ti, Cr, Sc, Hf):A first-principles study // SCT. — 2008. — Vol. 203. — P. 883–886.
9. Banakh O., Schmid P. E., Sanjines R., Levy F. High-temperature oxidation resistance of Cr1–xAlxN thin films deposited by reactive magnetron sputtering // SCT. — 2003. — Vol. 163–164. — P. 57–61.
10. Bobzin K., Lugscheider E., Maes M. The effect of pulse sequence modulation and pulse energy on structural coating properties and coating composition // SCT. — 2005. — Vol. 200. — P. 1560–1565.
11. Makino Y., Nogi K. Synthesis of pseudobinary Cr-AI-N films with Bl structure by rf-assisted magnetron sputtering method // SCT. — 1998. — Vol. 98. — P. 1008–1012.
12. Holzherr M., Falz M., Schmidt T. Influence of hollow cathode plasma on CrAlN-thin film deposition with vacuum arc evaporation sources // SCT. — 2008. — Vol. 203. — P. 505–509.
13. Rafaja D., Wüstefeld C., Dopita M., Klemm V., Heger D., Schreiber G., Šíma M. Formation of defect structures in hard nanocomposites // SCT. — 2008. — Vol. 203. — P. 572–578.
14. Yucel Birol. Sliding wear of CrN, CrAlN and AlTiN coated AISI H13 hotwork tool steels in aluminium extrusion // Tribology International. — 2013. — Vol. 57. — P. 101–106.
15. Mo J. L., Zhu M. H. Sliding tribological beha vior of CrAlN coating // Tribology International. — 2008. — Vol. 41. — P. 1161–1168.
16. Lugscheider E., Bobzin K., Hornig Th., Maes M. Investigation of the residual stresses and mechanical properties of (Cr, Al)N arc PVD coatings used for semi-solid metal (SSM) forming dies // TSF. — 2002. — Vol. 420– 421. — P. 318–323.
17. Mo J. L., Zhu M. H., Leyland A., Matthews A. Impact wear and abrasion resistance of CrN, CrAlN and AlTiN PVD coatings // SCT. — 2013. — Vol. 215. — P. 170–177.
18. Xing-zhao Ding, Zeng X. T., Liu Y. C., Fang F. Z., Lim G. C. Cr1−xAlxN coatings deposited by lateral rotating cathode arc for high speed machining applications // TSF. — 2008. — Vol. 516. — P. 1710–1715.
19. Ying Longn, Junjie Zeng, Donghai Yu, Shanghua Wu. Microstructure of TiAlN and CrAlN coatings and cutting performance of coated silicon nitride inserts in cast iron turning // Ceramic International. — 2014. — Vol. 40. — P. 9889–9894.
20. Tetsuhide Shimizu, Yoshikazu Teranishi, Kazuo Morikawa, Hidetoshi Komiya, Tomotaro Watanabe, Hiroshi Nagasaka, Ming Yang. Impact of pulse duration in high power impulse magnetron sputtering on the low-temperature growth of wurtzite phase (Ti, Al)N films with high hardness // TSF. — 2015. — Vol. 581. — P. 39–47.
21. Reiter A. E., Derflinger V. H., Hanselmann B., Bachmann T., Sartory B. Investigation of the properties of Al1–xCrxN coatings prepared by cathodic arc evaporation // SCT. — 2005. — Vol. 200. — P. 2114–2122.
22. Sabitzer C., Paulitsch J., Kolozsvári S., Rachbauer R., Mayrhofer P. H. Influence of bias potential and layer arrangement on structure and mechanical properties of arc evaporated CrAlN coatings // Vacuum. — 2014. — Vol. 106. — P. 49–52.
23. http: //www.plansee.com/en/products/thin-film-material/sputtering-targets-and-arcing-cathodes/ aluminum-chromium.html
24. Zhang G. P., Gaob G. J., Wang X. Q., Lv G. H., Zhou L., Chen H., Pang H., Yang S. Z. Influence of pulsed substrate bias on the structure and properties of TiAlN films deposited by ca thodic vacuum arc // Applied Surface Science. — Vol. 258. — P. 7274–7279.
25. Mukherjee, Prokert F., Richter E., Möller W. Comparison of TiN and Ti1–xAlxN coatings deposited on Al using plasma immersion ion implantation assisted deposition // Surface & Coatings Technology. — 2005. — Vol. 200. — P. 2459–2464.
26. Vasyliev V. V., Luchaninov A. A., Reshetnyak E. N., Strel’nitskij V. E. Comparative characteristics of stress and structure of TiN and Ti0,5–xAl0,5YxN coatings prepared by filtered vacuum-arc PIIID method, Proceedings of the International Conference Nanomaterials: Applications and Properties. — 2012. — Vol. 1, No 2. — P. 02NFC24-1-3.
27. Mukherjee S., Prokert F., Richter E., Moller W. Intrinsic stress and preferred orientation in TiN coatings deposited on Al using plasma immersion ion implantation assisted deposition // Thin Solid Films. — 2003. — Vol. 445. — P. 48–53.
28. Belous V. A., Vasyliev V. V., Goltvyanytsya V. S., Goltvyanytsya S. K. et al. Structure and properties of TiAlYN coatings deposited from filtered vacuum-arc plasma // Surface & Coatings Technology. — 2011. — Vol. 206. P. 1720–1726.
29. Belous, Vasyliev V., Luchaninov A., Marinin V., Reshetnyak E., Strel’nitskij V., Goltvyanytsya S., Goltvyanytsya V. Cavitation and abrasion resistance of TiAlYN coatings prepared by the PIII&D technique from filtered vacuum-arc plasma // Surface & Coatings Technology. — 2013. — Vol. 223. — P. 68–74.
30. Прибытков Г. А., Коржова В. В., Коростелева Е. Н. Прочностные свойства и особенности разрушения композитов Al-Cr, Al-Cr-Si, полученных горячим уплотнением порош¬ковых смесей // Деформация и разрушение материалов. — 2013. — № 8. — С. 13–20.
31. Васильєв В. В., Стрельницький В. Є. Спосіб транспортування вакуумно-дугової катодної плазми із фільтруванням від мікрочасток і пристрій для його здійснення / Патент України на винахід № 97584 від 27.02.2012.
32. Андреев А. А., Саблев Л. П., Шулаев В. М., Григорьев С. Н. Вакуумно-дуговые устройства и покрытия. — Харьков: ННЦХФТИ, 2005. — 236 с.
33. Васильев В. В., Лучанинов А. А., Решетняк Е. Н., Стрельницкий В. Е., Толмачева Г. Н., Прибытков Г. А., Гурских А. В., Криницын М. Г. Применение порошковых катодов для осаждения TiSiN покрытий из фильтрованной вакуумно-дуговой плазмы // PSE. — 2015. — Т. 13, № 2. — С. 148–163.
34. Белоус В. А., Заднепровский Ю. А., Ломино Н. С., Соболь О. В. Роль аргона в газовой смеси с азотом при получении нитридных конденсатов системы TiSiN в вакуумно-дуговых процессах осаждения // ЖТФ. — 2013. — Т. 83, вып. 7. — С. 69–76.
35. Кунченко В. В., Кунченко Ю. В., Картмазов Г. Н., Неклюдов И. М. и др. Наноструктурные сверхтвердые nc-TiN/a-Si3N4-покрытия, полученные методом вакуумно-дугового осаждения // Вопросы атомной науки и техники, Сер.: Физика радиационных повреждений и радиационное материаловедение. — 2006, № 4. — С. 185–190.
36. Belous V. A., Vasyliev V. V., Goltvyanytsya V. S., Goltvyanytsya S. K. et al. Structure and properties of TiAlYN coatings deposited from filtered vacuum-arc plasma // Surface & Coatings Technology. — 2011. — Vol. 206. — P. 1720–1726.
37. Davis C. A. A simple model for the formation of compressive stress in thin films by ion bombardment // Thin Solid Films. — 1993. — Vol. 226. — P. 30–34.
38. Reshetnyak E. N. Structure and stress state of TiN and Ti0.5–xAl0.5YxN coatings prepared by the PIII&D technique from filtered vacuum-arc plasma // ВАНТ, Серия: Вакуум, чистые материалы, сверхпроводники. — 2014. — № 1 (20). — C. 159–162.
39. Akkaya S. S., Vasyliev V. V., Reshetnyak E. N., Kazmanli K., Solak N., Strel’nitskij V. E., Ürgen M. Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma // Surface & Coatings Technology. — 2013. —Vol. 236. — P. 332–340.
Published
2016-06-24
How to Cite
Васильев, В. В., Лучанинов, А. А., Решетняк, Е. Н., Стрельницкий, В. Е., Толмачева, Г. Н., Прибытков, Г. А., & Коржова, В. В. (2016). Structure and properties of nitride coatings deposited from filtered vacuum arc plasma generated by evaporation of cromium-aluminum powder cathode. Journal of Surface Physics and Engineering, 1(1), 62–80. Retrieved from https://periodicals.karazin.ua/pse/article/view/6095
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