One-dimensional image scaling with a reflecting X-ray mask

doi:10.26565/2222-5617-2022-37-02

V.S. Chumak National Technical University “Kharkiv Polytechnic Institute”, Ukraine, 61002,Kharkiv, Kyrpychova str., 2 https://orcid.org/0000-0002-7268-1103
S. Peredkov Max-Planck-Institute Für Chemische Energiekonversion; Stiftstrasse 34 – 36, 45470 Mülheim an der Ruhr, Germany, Nordrhein-Westfalen https://orcid.org/0000-0002-5816-9015
V.V. Kondratenko National Technical University “Kharkiv Polytechnic Institute”, Ukraine, 61002,Kharkiv, Kyrpychova str., 2 https://orcid.org/0000-0002-9194-9304
I.A. Kopylets National Technical University “Kharkiv Polytechnic Institute”, Ukraine, 61002,Kharkiv, Kyrpychova str., 2 https://orcid.org/0000-0002-8906-5155
Yu.P. Pershin National Technical University “Kharkiv Polytechnic Institute”, Ukraine, 61002,Kharkiv, Kyrpychova str., 2 https://orcid.org/0000-0001-9092-0078

DOI: https://doi.org/10.26565/2222-5617-2022-37-02

Keywords: X-ray multilayer mirror, reflective X-ray mask, image compression

Abstract

The work deals with the issue of miniaturization of template images using X-ray radiation. The compression method is based on the fact that X-ray radiation is directed at a specific template that reflects X-ray radiation at an grazing angle and a one-dimensional compressed image is recorded on a plane not parallel to the plane of the template. The advantage of this method of image compression is the relative simplicity of its implementation. The paper proposes the use of X-ray multilayer mirrors as reflective X-ray masks (RXM) for one-dimensional image compression. Control of the structural parameters of multilayer mirrors was carried out on a DRON- 3M X-ray diffractometer. The RXM template was formed by sputtering an absorbing WC layer with a thickness of ~0.2 μm through a certain stencil on the surface of a multilayer mirror. The test of the RXM with mirrors based on a pair of WC/Si materials in synchrotron radiation (l~3.5 nm) was carried out. A 14-fold compression of the reflective segments of the RXM with a size of ~50 μm was obtained. Theoretically, the principle possibility of obtaining compression of reflective segments to submicron sizes is shown.

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