RF ELECTROMAGNETIC FIELD ABSORPTION INSIDE HELICON ION SOURCE IN NONAXIAL MAGNETIC FIELD
Abstract
The paper studies integral characteristics and one-dimensional distribution of RF power absorption in a helicon plasma with external magnetic field directed at an angle to a plasma plane. Two kinds of working gas heli and hydrogen are considered. A simplified model of a helicon plasma plane layer is used here. Calculation results are used to explain power absorption in a compact helicon ion source with nonuniform external magnet field. An ion source is a part of a nuclear scanning microprobe (NSMP) injector at the Institute of Applied Physics NAS of Ukraine. Calculations for ion source parameters of the NSMP injector show a resonant behaviour of integral RF power absorption as a function of a magnet field inclination angle. A model (planar) geometry is verified here for solution of this problem.
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References
Shamrai K.P., Taranov V.B. Resonance wave discharge and collisional energy absorption in helicon plasma source // Plasma Phys. Control. Fusion. – 1994. – Vol. 36. – P.1719.
Aleksandrov A.F., Vorob'ev N.F., Kral'kina E.A., Obuhov V.A., Ruhadze A.A. Teorija kvazistaticheskih plazmennyh istochnikov // Zhurnal tehnicheskoj fiziki. – 1994. – T.64. – S. 53.
Aleksandrov A.F., Bugrov G.E., Vavilin K.V., Kerimova I.F., Kondranin S.G., Kral'kina E.A., Pavlov V.B., Plaksin V.Ju., Ruhadze A.A. Samosoglasovannaya model' VCh induktivnogo istochnika plazmy, pomeshhennogo vo vneshnee magnitnoe pole // Fizika plazmy. – 2004. – T. 30. – S. 434.
Shamrai K.P., Taranov V.B. Volume and surface RF power absorption in a helicon plasma source // Plasma Sources Sci. Technol – 1996. – Vol. 5. – P. 474.
Miroshnichenko V.I., Mordik S.N., Olshansky V.V., Stepanov K.N., Storizhko V.E., Sulkio-Cleff B., Voznyy V.I. Possibility to increase RF ion source brightness for nuclear microprobe applications // Nuclear Instruments and Methods in Physics Research B. – 2003. – Vol. 201 – P. 630.
Aleksenko O.V., Miroshnichenko V.I., Mordik S.N. Prostranstvennoe raspredelenie poter' VCh elektromagnitnogo polja v plazmennom istochnike gelikonnogo tipa // Fizika plazmy. – 2014. – T. 40. – S. 764.
Alexenko O.V., Miroshnichenko V.I., Mordik S.N. Resonant RF electromagnetic field input in the helicon plasma ion source // Problems of atomic science and technology. – 2014. – No.5. – P.153.
Chevalier G., Chen F.F. Experimental modeling of inductive discharges // J. Vac. Sci. Technol. A. – 1993. – Vol. 11. – P. 1165.
Braginskij O.V., Vasil'eva A.N., Kovalev A.S. Gelikonnaya plazma v neodnorodnom magnitnom pole // Fizika plazmy. – 2001. – T.27. - S.741.
Guo X.M., Scharer J., Mouzouris Y., Louis L. Helicon experiments and simulations in nonuniform magnetic field configurations // Phys. Plasmas. – 1999. – Vol. 6. – P. 3400.
Gilland J., Breun R., Hershkowitz N. Neutral pumping in a helicon discharge // Plasma Sources Sci. Technol. – 1998. – Vol. 7. – P. 416.
Chen F.F. The low-field density peak in helicon discharges // Phys. Plasmas. – 2003. – Vol. 10. – P. 2586.
Shamraj K.P., Virko V.F., Virko Ju.V., Kirichenko G.S. Povyshenie effektivnosti gelikonnogo razrjada v shodyashhemsya magnitnom pole // VANT. – 2003. – No.4. – S.241.
Shamrai K.P., Virko V.F., Virko Yu.V., Kirichenko G.S. Wave phenomena, hot electrons, and enhanced plasma production in a helicon discharge in a converging magnetic field // Physics of plasmas. – 2004. – Vol. 11. – P. 3888.
Geller R. Electron Cyclotron Resonance Ion Sources and ECR Plasma. – Bristol and Philadelphia: Institute of Physics Publishing, 1996. – 308p.
Lieberman M. A., Lichtenberg A. J. Principles of Plasma Discharge and Material Processing. – N.Y.: John Wiley & Sons, 2005. – 330p.
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