Analysis of the Ion Beam Composition of InSb and (InSb)0.98Bi0.02 Obtained by Liquid Metal Ion Source
Abstract
To investigate the mass composition of the ion beam obtained through field ion emission, a mass analyzer designed analogous to the Wien velocity filter was utilized. This Wien filter analyzer operates based on the principle of intersecting mutually perpendicular electric and magnetic fields (E×B) to classify charged particles according to their mass and charge. The ion beam was obtained using mInSb and InSb0.98Bi0.02 as the working The mass composition of the ion group was analyzed using this method. In the experiments, it was found that the ion beam obtained using InSb as the working substance had a homogeneous composition, consisting solely of (InSb)+ ions. However, in contrast, when the working substance was (InSb)0.98Bi0.02, it was determined that the ion beam had a miscellaneous composition. In addition to (InSb)+ ions, the ion beam was found to contain ((InSb)0.98Bi0.02)+ and (Bi)+ ions.
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