Software-hardware complex for optimization of transporting abilities of vacuum arc filters
Keywords:
vacuum arc, filter, probe, ion current, plasma transport
Abstract
This work describes optimization of multichannel probe, which in couple with the written for its work software presents a modern tool for adjustment and study of transporting abilities of vacuum arc plasma sources. Influence of magnetic field created by coils of T-shaped filter on spatial distribution of output ion current was investigated. Optimal values of coils currents, which allow one to increase productivity of studied device, were determined.
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References
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Аксёнов И. И., Андреев А. А., Белоус В. А., Стрельницкий В. Е., Хороших В. М. Вакуумная дуга: источники плазмы, осаждение покрытий, поверхностное модифицирование. — Киев: Наукова думка, 2012. — 728 с.
Anders A., MacGill R. A. Asymmetric Injection of Cathodic Arc Plasma into a Macroparticle Filter // J. Appl. Phys. — 2004. — Vol. 95. — P. 7602–7606.
Kleiman A., Márquez A., Boxman R. L. Performance of a magnetic island macroparticle filter in a titanium vacuum arc // Plasma Sources Sci. Technol. — 2008. — Vol. 17. —P. 015008-1–7.
Zhitomirsky V. N., Zarchin O., Wang Sh. G. et al. Ion Current Produced by a Vacuum Arc Carbon Plasma Source // IEEE Trans. Plasma Sci. — 2001. — Vol. 29, No. 5. — P. 776–780.
Baranov O., Romanov M., Ostrikov K. Effective control of ion fluxes over large areas by
magnetic fields: From narrow beams to highly uniform fluxes // Physics of Plasmas. — 2009. — Vol. 16. — P. 053505-1–5.
Yukimura K., Muraho T., Ma X., Ikehata T. Ion current distribution on a 200-mm-diameter disk target by titanium cathodic arc plasma-based ion implantation and deposition // Surf. Coat. Technol. — 2004. — Vol. 186. — P. 104–107.
Бизюков Ю. А., Васильев В. В., Лучанинов А. А., Стрельницкий В. Е. Автоматизированная система измерения пространственного распределения плотности ионного тока в потоке плазмы // Сб. тр. Харьковской нанотехнологической ассамблеи. — Харьков: Тонкие плёнки, 2007. — С. 232–235.
Zhitomirsky Y. N., Kinrot U., Alterkop B. Influence of gas pressure on the ion current and its distribution in a filtered vacuum arc deposition system // Surf. Coat. Technol. — 1996. — Vol. 86–87. — P. 263–270.
Aksyonov D. S., Aksenov I. I., Luchaninov A. A. et al. Plasma Streams Mixing in Two-Channel T-Shaped Magnetic Filter // Problems of Atomic Science and Technology. Ser. Vacuum, Pure Materials, Superconductors. — 2011. — No. 6. — P. 116–120.
Aksenov I. I. A vacuum arc in erosion plasma sources. — Kharkiv: NSC KIPT, 2005. — 212 p.
Published
2017-04-27
How to Cite
Аксёнов, Д. С., Аксёнов, И. И., & Стрельницкий, В. Е. (2017). Software-hardware complex for optimization of transporting abilities of vacuum arc filters. Journal of Surface Physics and Engineering, 1(4), 361-372. Retrieved from https://periodicals.karazin.ua/pse/article/view/8499
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Статті
У відповідності з типовим шаблоном.
