Calculation of the generator for induction discharge initiation

A. M. Deryzemlia National Science Center “Kharkov Institute of Physics and Technology” 1 Akademicheskaya St. 61108 Kharkov, Ukraine
P. G. Kryshtal National Science Center “Kharkov Institute of Physics and Technology” 1 Akademicheskaya St. 61108 Kharkov, Ukraine
V. I. Radchenko National Science Center “Kharkov Institute of Physics and Technology” 1 Akademicheskaya St. 61108 Kharkov, Ukraine
O. I. Yevsiukov National Science Center “Kharkov Institute of Physics and Technology” 1 Akademicheskaya St. 61108 Kharkov, Ukraine
D. A. Khizhnyak National Science Center “Kharkov Institute of Physics and Technology” 1 Akademicheskaya St. 61108 Kharkov, Ukraine
B. M. Shirokov National Science Center “Kharkov Institute of Physics and Technology” 1 Akademicheskaya St. 61108 Kharkov, Ukraine

Keywords: RF generator, cylindrical inductively coupled plasma, silicon tetrachloride

Abstract

The upgraded RF generator operating at 880 kHz in wide ranges of radio-frequency power and gas pressure has been developed. The resonant circuits of the generator are calculated at 880 kHz. Real and imaginary components of the discharge system impedance versus the electron density are under consideration for the cylindrical inductively coupled plasma.

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References

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