Development of a Capacitive Pressure Sensor Based on Nanoporous Anodic Aluminium Oxide
Abstract
Capacitive pressure sensors make pressure sensing technology more accessible to a wider range of applications and industries, including consumer electronics, automotive, healthcare etc. However, developing a capacitive pressure sensor with brilliant performance using a lowcost technique remains a difficulty. In this work, the development of a capacitive pressure sensor based on nanoporous AAO fabricated by a two-step anodization approach which offers a promising solution for precise pressure measurement is fabricated by a two-step anodization approach. A parallel plate capacitive sensor was fabricated by placing two AAO deposited sheets are placed face to face, with the non-anodized aluminum component at the base functioning as the top and bottom electrodes. A variation in the capacitance value of the as fabricated sensor was observed over an applied pressure range (100 Pa-100 kPa). This change in capacitance can be attributed to the decrease in the distance between the two plates and the non-homogenous distribution of contact stress and strain due to the presence of nanoporous AAO structure. In this pressure range the sensor showed high sensitivity, short response time and excellent repeatability which indicates a promising future of the fabricated sensor in consumer electronics, intelligent robotics etc.
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W. Wu, X. Wen, and Z.L. Wang, “Taxel-Addressable Matrix of Vertical-Nanowire Piezotronic Transistors for Active and Adaptive Tactile Imaging,” Science 340, 952 (2013). https://doi.org/10.1126/science.1234855
C. Pan, L. Dong, G. Zhu, S. Niu, R. Yu, Q. Yang, Y. Liu, and Z.L. Wang, “High-resolution electroluminescent imaging of pressure distribution using a piezoelectric nanowire LED array,” Nature Photon 7, 752 (2013). https://doi.org/10.1038/nphoton.2013.191
E. Kar, N. Bose, B. Dutta, N. Mukherjee, and S. Mukherjee, “Ultraviolet- and Microwave-Protecting, Self-Cleaning e-Skin for Efficient Energy Harvesting and Tactile Mechanosensing,” ACS Appl. Mater. Interfaces 11, 17501 (2019). https://doi.org/10.1021/acsami.9b06452
K. Wang, Z. Lou, L. Wang, L. Zhao, S. Zhao, D. Wang, W. Han, et al., “Bioinspired Interlocked Structure-Induced High Deformability for Two-Dimensional Titanium Carbide (MXene)/Natural Microcapsule-Based Flexible Pressure Sensors,” ACS Nano 13, 9139 (2019). https://doi.org/10.1021/acsnano.9b03454
L.-Q. Tao, K.-N. Zhang, H. Tian, Y. Liu, D.-Y. Wang, Y.-Q. Chen, Y. Yang, et al., “Graphene-Paper Pressure Sensor for Detecting Human Motions,” ACS Nano 11, 8790 (2017). https://doi.org/10.1021/acsnano.7b02826
S. Zhang, H. Liu, S. Yang, X. Shi, D. Zhang, C. Shan, L. Mi, et al., “Ultrasensitive and Highly Compressible Piezoresistive Sensor Based on Polyurethane Sponge Coated with a Cracked Cellulose Nanofibril/Silver Nanowire Layer,” ACS Appl. Mater. Interfaces 11, 10922 (2019). https://doi.org/10.1021/acsami.9b00900
D.J. Lipomi, M. Vosgueritchian, B.C.-K. Tee, S.L. Hellstrom, J.A. Lee, C.H. Fox, et al., “Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes,” Nature Nanotech 6,788 (2011). https://doi.org/10.1038/nnano.2011.184
G.Y. Bae, J.T. Han, G. Lee, S. Lee, S.W. Kim, S. Park, J. Kwon, et al., “Pressure/Temperature Sensing Bimodal Electronic Skin with Stimulus Discriminability and Linear Sensitivity,” Adv. Mater 30, 1803388 (2018). https://doi.org/10.1002/adma.201803388
C.M. Boutry, L. Beker, Y. Kaizawa, C. Vassos, H. Tran, A.C. Hinckley, R. Pfattner, et al., “Biodegradable and flexible arterial-pulse sensor for the wireless monitoring of blood flow,” Nat. Biomed. Eng. 3, 47 (2019). https://doi.org/10.1038/s41551-018-0336-5
S. Wang, Y. Xie, S. Niu, L. Lin, and Z.L. Wang, “Freestanding Triboelectric‐Layer‐Based Nanogenerators for Harvesting Energy from a Moving Object or Human Motion in Contact and Non‐contact Modes,”Adv. Mater. 26, 2818 (2014). https://doi.org/10.1002/adma.201305303
A. Yu, Y. Zhu, W. Wang, and J. Zhai, “Progress in Triboelectric Materials: Toward High Performance and Widespread Applications,” Adv. Funct. Materials 29, 1900098 (2019). https://doi.org/10.1002/adfm.201900098
Q. Guan, G. Lin, Y. Gong, J. Wang, W. Tan, D. Bao, Y. Liu, et al., “Highly efficient self-healable and dual responsive hydrogel-based deformable triboelectric nanogenerators for wearable electronics,” J. Mater. Chem. A 7, 13948 (2019). https://doi.org/10.1039/C9TA02711D
S. Wang, J. Xu, W. Wang, G.-J.N. Wang, R. Rastak, F. Molina-Lopez, J.W. Chung, et al.,“Skin electronics from scalable fabrication of an intrinsically stretchable transistor array,” Nature 555, 83 (2018). https://doi.org/10.1038/nature25494
K. Takei, T. Takahashi, J.C. Ho, H. Ko, A.G. Gillies, P.W. Leu, R.S. Fearing, et al., “Nanowire active-matrix circuitry for low-voltage macroscale artificial skin,” Nature Mater. 9, 821 (2010). https://doi.org/10.1038/nmat2835
Y. Zang, F. Zhang, D. Huang, X. Gao, C. Di, and D. Zhu, “Flexible suspended gate organic thin-film transistors for ultra-sensitive pressure detection,” Nat.Commun. 6, 6269 (2015). https://doi.org/10.1038/ncomms7269
C.-A. Ku, C.-W. Hung, and C.-K. Chung, “Influence of Anodic Aluminum Oxide Nanostructures on Resistive Humidity Sensing,” Nanomanufacturing 4, 58 (2024). https://doi.org/10.3390/nanomanufacturing4010004
G.-H. Lim, I.-Y. Kim, J.-Y. Park, Y.-H. Choa, and J.-H. Lim, “Anodic Aluminum Oxide-Based Chemi-Capacitive Sensor for Ethanol Gas,” Nanomaterials 14, 70 (2023). https://doi.org/10.3390/nano14010070
R.K. Nahar, “Study of the performance degradation of thin film aluminum oxide sensor at high humidity,”Sens. Actuators B: Chem. 63, 49 (2000). https://doi.org/10.1016/S0925-4005(99)00511-0
S.W. Chen, O.K. Khor, M.W. Liao, and C.K. Chung, “Sensitivity evolution and enhancement mechanism of porous anodic aluminum oxide humidity sensor using magnetic field,” Sens. Actuators B: Chem. 199, 384 (2014). https://doi.org/10.1016/j.snb.2014.03.057
C.K. Chung, O.K. Khor, C.J. Syu, and S.W. Chen, “Effect of oxalic acid concentration on the magnetically enhanced capacitance and resistance of AAO humidity sensor,”Sens. Actuators B: Chem. 210, 69 (2015). https://doi.org/10.1016/j.snb.2014.12.096
Z. He, L. Yao, M. Zheng, L. Ma, S. He, and W. Shen, “Enhanced humidity sensitivity of nanoporous alumina films by controlling the concentration and type of impurity in pore wall,” Phys. E: Low-Dimens. Syst. Nanostruct. 43, 366 (2010). https://doi.org/10.1016/j.physe.2010.08.013
M.A. Kashi, A. Ramazani, H. Abbasian, and A. Khayyatian, “Capacitive humidity sensors based on large diameter porous alumina prepared by high current anodization,” Sens. Actuators A: Phys. 174, 69 (2012). https://doi.org/10.1016/j.sna.2011.11.033
C.K. Chung, O.K. Khor, E.H. Kuo, and C.A. Ku, “Total effective surface area principle for enhancement of capacitive humidity sensor of thick-film nanoporous alumina,” Mater. Lett. 260, 126921 (2020). https://doi.org/10.1016/j.matlet.2019.126921
K. Sharma, and S.S. Islam, “Optimization of porous anodic alumina nanostructure for ultra-high sensitive humidity sensor,” Sens. Actuators B: Chem. 237, 443 (2016). https://doi.org/10.1016/j.snb.2016.06.041
M. Balde, A. Vena, and B. Sorli, “Fabrication of porous anodic aluminium oxide layers on paper for humidity sensors,” Sens. Actuators B: Chem. 220, 829 (2015). https://doi.org/10.1016/j.snb.2015.05.053
R. Andika, F. Aziz, Z. Ahmad, M. Doris, V. Fauzia, T.M. Bawazeer, N. Alsenany, et al., “Organic nanostructure sensing layer developed by AAO template for the application in humidity sensors,” J. Mater. Sci.: Mater. Electron. 30, 2382 (2019). https://doi.org/10.1007/s10854-018-0511-1
C.C. Yang, T.H. Liu, and S.H. Chang, “Relative humidity sensing properties of indium nitride compound with oxygen doping on silicon and AAO substrates,” Mod. Phys. Lett. B 33, 1940044 (2019). https://doi.org/10.1142/S021798491940044X
Y. Kim, B. Jung, H. Lee, H. Kim, K. Lee, and H. Park, “Capacitive humidity sensor design based on anodic aluminum oxide,” Sens. Actuators B: Chem. 141, 441 (2009). https://doi.org/10.1016/j.snb.2009.07.007
J.O. Carneiro, A. Ribeiro, F. Miranda, I.R. Segundo, S. Landi, V. Teixeira, and M.F.M. Costa, “Development of Capacitive-Type Sensors by Electrochemical Anodization: Humidity and Touch Sensing Applications,” Sensors 21, 7317 (2021). https://doi.org/10.3390/s21217317
Y. Guo, S. Gao, W. Yue, C. Zhang, and Y. Li, “Anodized Aluminum Oxide-Assisted Low-Cost Flexible Capacitive Pressure Sensors Based on Double-Sided Nanopillars by a Facile Fabrication Method,” ACS Appl. Mater. Interfaces 11, 48594 (2019). https://doi.org/10.1021/acsami.9b17966
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