PLASMA FILTERS IN TECHNIQUE OF THE VACUUM-ARC COMPOSITE COATING DEPOSITION

doi:10.26565/2312-4334-2014-1-07

D. S. Aksyonov National Science Centre "Kharkov Institute of Physics and Technology"Academicheskaya Str. 1, Kharkov 61108, Ukraine
I. I. Aksenov National Science Centre "Kharkov Institute of Physics and Technology" Academicheskaya Str. 1, Kharkov 61108, Ukraine
V. A. Belous National Science Centre "Kharkov Institute of Physics and Technology" Academicheskaya Str. 1, Kharkov 61108, Ukraine
Yu. A. Besedina National Science Centre "Kharkov Institute of Physics and Technology" Academicheskaya Str. 1, Kharkov 61108, Ukraine
S. I. Mel’nikov National Science Centre "Kharkov Institute of Physics and Technology" Academicheskaya Str. 1, Kharkov 61108, Ukraine

DOI: https://doi.org/10.26565/2312-4334-2014-1-07

Abstract

The brief survey of devices for micro- and nanostructured composite coatings formation by deposition from a filtered cathodic arc plasma is given. The main attention is paid on the features specifying that how uniform is thickness and composition distribution of the coating deposited by use of those devices. Analysis of the publications showed that in respect of ability to obtain uniform coatings the wide-aperture single- and two-channel systems with acute-angled or “specular” magnetic fields are the most perspective. The setup which have been tasted rigidly in industrial conditions, and designed efficient setups equipped with the said systems are described as examples.

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Author Biography

D. S. Aksyonov, National Science Centre "Kharkov Institute of Physics and Technology"Academicheskaya Str. 1, Kharkov 61108, Ukraine

iaksenov.nsckipt@gmail.com

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