Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
Keywords:
ceramics, composite coatings, magnetron sputtering method, physical and mechanical properties
Abstract
By means of the magnetron sputtering method using the DC and pulsed voltages applied to the target, the coatings based on AlN-TiB2-TiSi2 ceramics were obtained. An amorphous-like structure of the obtained coatings was revealed. It had the area of ordering ~ 1 nm and the viscoplasticity coefficient of 0.07. The hardness of the coatings reaches 15.3 GPa, and the modulus of elasticity is 206 GPa. The coatings are characterized by high adhesion strength to the substrate.
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References
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Kelly P.J., Arnell R.D. Magnetron sputtering: a review of recent developments and applications //J. Vacuum. – 2000. – Vol. 56. – P. 159-172.
Musil J., Baroch P., Vlиek J. et al. Reactive magnetron sputtering of thin films: present status and trends//Thin Solid Films. – 2005. – Vol. 475. – P. 208-218.
Berlin E.V., Seidman L.A. Ion-plasma processes in thin-film technology. – M.: Technosphere, 2010. – 528 p. (by Russian).
Azarenkov N.A., Sobol O.V., Pogrebnjak A.D., Beresnev V.M. Engineering of vacuum-plasma coatings. – Kharkiv: Karazin Kharkiv National University, 2011. – 344 p. (by Russian).
Lavrov V.N., Orlov I.I., Fedotov A.F. Thermal conductivity and temperature of vacuum-arc evaporation of multilayers of SVS-pressed cathode systems TiS0.5-Al and TiS0.5-Al-Si//Vestn. Samar. State. Tehn. Univ. Ser. Technical sciences. – 2013. – No. 1 (37). – P. 72-86. (by Russian).
Samsonov G.V., Vinnitskiy I.M. Refractory compounds: A handbook. – M.: Metallurgy, 1976. – 560 p. (by Russian).
Samsonov G.V., Dvorin L.A. PV Geld Silicide. – M.: Metallurgy, 1979. – 272 p. (by Russian).
Andreev A.A., Sabers L.P., Grigoriev S.N. Vacuum-arc coating. – Kharkiv: NSC “KhPTI”, 2010. – 317 p. (by Russian).
Firsov S.A., Rogul T.G. Theoretical (limiting) hardness//Add. National Academy of Sciences of Ukraine. – 2007. – No. 4. – P. 110-114.
Shautsukov A.G. Contemporary conception about the possible mechanisms of adhesion of metallic films to different films//Applied Physics. – 2006. – No. 5. – P. 16-21. (by Russian).
Matsevity V.M. Coatings for cutting tools. – Kharkov: High School, 1987. – 127 p. (by Russian).
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Published
2017-07-21
How to Cite
Torianik, I. N., Beresnev, V. M., Pogrebnjak, A. D., Sobol, O. V., Beresneva, Y. V., Podcherniaieva, I. A., Kropotov, A. Y., Stiervoiedov, N. G., Turbin, P. V., Kolesnikov, D. A., Grankin, S. S., Nyemchenko, U. S., Srebniuk, P. A., & Novikov, V. Y. (2017). Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2. Journal of Surface Physics and Engineering, 11(3), 299 - 303. Retrieved from https://periodicals.karazin.ua/pse/article/view/8764
Section
Статті
У відповідності з типовим шаблоном.
