Use of the determined properties of a roughness of a surface in measurement of a geometrical form of object
Keywords:
surface, roughness, diffraction grating, coherent radiation
Abstract
Classification of surfaces as roughness is carried out. The roughness can have the determined, stochastic or chaotic character, depending on a method of their forming. In the work the problem of finding of normal vector to a surface and coordinates of a point of lighting by a laser beam for the case of approximation of a roughness by a flat reflective diffraction grating is solved.
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References
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Nasarov V.N., Lin‘kov A.E. Diffraction methods of control of geometric parameters and spatial positioning of objects//Optical magazine. − 2002. − Vol. 69, № 2. − P. 76-81.
Born M., Vol‘f E. Basis of optics. − M.: Science, 1970.
Borovikov V.A., Kinber B.E. Geometric theory of diffraction. − M.: Communication, 1978. − 247 p.
Vinogradova M.B., Rudenko O.V., Suhorukov A.P. Theory of waves. – M.: Science, 1979. – 384 p.
Volkov V.V. et al. Measuring of dimensions of integrated circuits taking into account real profile of etching by diffraction pattern//Microelectronics. – 1984. – Vol.13, ed.1. – P. 64-72.
Shestopalov V.P., Kirilenko A.A., Masalov S.A., Sirenko Yu.K. Resonant scattering of waves. V. 1. Diffraction gratins. − K.: Scientific mind, 1986. – 232 p.
Andrenko S.D., Evdokimov A.P., Sidorenko Yu.B., Shestopalov V.P. Features of scattering of waves from skew grating. − Kharkiv: AS USSR Preprint №244, 1984. – 40 p.
Lahno V.I., Priyomko A.A. Speckle method of measuring of configuration of industrial products //Col. Of Sci. Articles KhStTURE. – 1999. – Vol. 1. – P. 105-108.
Korn G., Korn T. Reference book on mathematics. – M.: Science, 1984. – 831 p.
Published
2017-07-21
How to Cite
Dzubenko, M. I., Kolpakov, S. N., Popov, I. V., & Pryyomko, A. A. (2017). Use of the determined properties of a roughness of a surface in measurement of a geometrical form of object. Journal of Surface Physics and Engineering, 11(3), 254 - 259. Retrieved from https://periodicals.karazin.ua/pse/article/view/8755
Section
Статті
У відповідності з типовим шаблоном.
