Formation stages of pulsed discharge in oxygen and carbon tetrafluoride

V. A. Lisovskiy V. N. Karazin Kharkiv National University, Scientific Center of Physical Technologies
P. A. Ogloblina V. N. Karazin Kharkiv National University, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Lisbon, Portugal
S. V. Dudin V. N. Karazin Kharkiv National University, Scientific Center of Physical Technologies
V. D. Yegorenkov V. N. Karazin Kharkiv National University
A. N. Dakhov V. N. Karazin Kharkiv National University
V. I. Farenik V. N. Karazin Kharkiv National University, Scientific Center of Physical Technologies

Keywords: pulse discharge, current and voltage oscilloscope waveforms, discharge formation, plasma phase, afterglow

Abstract

This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon tetrafluoride pressure values of 0.1 and 1 Torr. Current oscilloscope waveforms of the glow pulsed discharge have been found to possess a plasma phase and an afterglow phase. The following stages of the plasma phase have been observed: 1. The capacitive current pulse of about 0.5–1 μs in duration; 2. The current growth stage the duration of which depends on the gas species, the plasma phase duration and the pressure; 3. The plateau (remarkably pronounced only for carbon tetrafluoride and absent for other gases); 4. The current decrease of tens microseconds in duration down to the level corresponding to that of the direct voltage discharge.

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Author Biographies

V. A. Lisovskiy, V. N. Karazin Kharkiv National University, Scientific Center of Physical Technologies

с.н.с.

P. A. Ogloblina, V. N. Karazin Kharkiv National University, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Lisbon, Portugal

с.н.с.

S. V. Dudin, V. N. Karazin Kharkiv National University, Scientific Center of Physical Technologies

с.н.с.

V. D. Yegorenkov, V. N. Karazin Kharkiv National University

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A. N. Dakhov, V. N. Karazin Kharkiv National University

с.н.с.

V. I. Farenik, V. N. Karazin Kharkiv National University, Scientific Center of Physical Technologies

с.н.с.

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