Structural and phase surface state at high ion implantation of Ti in Cu single crystals
Keywords:
ion implantation, titanium ions, amorphous films, titanium carbide
Abstract
The results of experimental research of the concentration interface profiles of the implanted ions and the co product impurities over the depth of the surface of copper single crystals as a result of high-dose implantation of titanium ions are shown. It is found that thin amorphous carbon and oxidized films and titanium carbide are formed close to the surface as a result of titanium ions impact.
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References
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2. Pout G. M., Foti G., Jacobson D. K. Surface modification and alloying by laser, ion, and electron beams. — М.: Mashinostroenie, 1987. — 443 p.
3. Guseva M. I. Ion implantation in metals // Surface. Physics, chemistry, mechanics. — 1986. — Vol. 2. — P. 27–50.
4. Vladimirov B. G., Guseva M. I., Fedorov A. V. et. al. Investigation of properties of ion-implanted steels // Surface. Physics, chemistry, mechanics. — 1983. — Vol. 7. — P. 123—128.
5. Komarov F. F. Ion implantation in metals. — М.: Metallurgy, 1990. — 216 p.
6. Bely A. V., Kukareko V. A., Lobodaeva O. V. Phase and structural transitions in iron and its alloys at ion implantation // The physics of metals and metallography. — 1995. — Vol. 80. — P. 82–95.
7. Buryankov A. F., Komarov F. F., Fedotov S. A. Deep distribution of impurity at ion implantation with formation of stable phases // Surface. — 1990. — No. 5. — P. 75–80.
8. Аymakov M. Sh., Zhetbayevв А. К., Kardyzhanov К. К. Phase formation in iron, implantated with ions of nitrogen and carbon // Surface. — 1988. — No. 10. — P. 134–137.
9. Pogrebnjak A. D., Sharkeev Yu. P., Lychaghin D. V. et. al. Relation of mechanical and frictional properties to defects in high power ion beam irradiated α-Fe // Phys. Letters A. — 1989. — Vol. 141, No. 3–4. — P. 204–206.
10. Pogrebnjak A. D., Duvanov S. M., Mikhaliov A. D. et al. Surface and near surface structure and composition of high-dose implanted and electron beam annealed single crystal copper // Surf. Coat. Technol. — 1997. — Vol. 89. — P. 90–96.
11. Shulov V. A., Remnev G. Ye., Kascheev V. N. et. al. Influence of ion and beam processing by high power pulse beams on physical and chemical state of the surface layers and on fatigue strength of EP718I alloy // Physics and Chemistry of Materials Treatment. — 1992. — No. 6. — P. 28–35.
12. Pogrebnjak A. D., Shantyr R. I., Kul’ment’eva O. P. Modification and mixing multilayer systems by means of a high-power ion beam // Vacuum. — 2002. — Vol. 67. — P. 243–248.
Published
2016-06-24
How to Cite
Погребняк, А. Д., & Джаруллах, А. К. (2016). Structural and phase surface state at high ion implantation of Ti in Cu single crystals. Journal of Surface Physics and Engineering, 1(1), 57–61. Retrieved from https://periodicals.karazin.ua/pse/article/view/6094
Section
Статті
У відповідності з типовим шаблоном.
