Principles of physical image decoding in scanning microwave microscopy

Ю. Є. Гордієнко Kharkiv National University of Radio Electronics
А. В. Левченко Kharkiv National University of Radio Electronics
І. М. Щербань Kharkiv National University of Radio Electronics

Keywords: scanning microwave microscopy, conversion characteristics, reconstruction of images, multiparameter diagnostics, analytical approximation

Abstract

In the paper, the methods of constructing images in SMM are numerically studied, providing visualization of profiles of the distribution of physical parameters of an object in the near-surface region. It is shown that the image of the fundamental signals of the change in the resonant frequency and Q of the resonator scanning probe does not always correspond to the profile of the indicated parameters. To ensure such correspondence, it is proposed to reconstruct the image of these signals on the basis of an analytical approximation of the corresponding conversion characteristics of the probe and formation of the optimal signal packet. In particular, to ensure an imaging of the electrical conductivity profile σ(x, y), a combined signal of the form ΔQ^-1/Δf (x, y) should be used. For two-parameter diagnostics of the profile ε (x, y) and the surface profile Δh_Z(x, y), it is advisable to use two signals Δf1(x, y) and Δf2(x, y) for various fixed values of the gap h_Z1 and h_Z2 and analytical approximations of the corresponding conversion characteristics. The results of the study are illustrated by demonstrating the profile of the common signal and the reconstructed profile of physical quantities.

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Author Biographies

Ю. Є. Гордієнко, Kharkiv National University of Radio Electronics

Prof.

А. В. Левченко, Kharkiv National University of Radio Electronics

Scientist

І. М. Щербань, Kharkiv National University of Radio Electronics

Scientist

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