Regularities formation of stress-strain state ion-plasma condensates of TiС-WC system
Keywords:
quasi-binary system, magnetron sputtering, coating, nanocrystalline state, X-ray diffractometryAbstract
By X-ray diffraction, including X-raytensometry (“a-sin2ψ”-method) analyzed phase-structural and stress-strain state of the ion- plasma coatings quasi-binary system TiC-WC depending on the ratio of TiC/WC components and the deposition temperature. Extension installed (compared to the equilibrium) region of existence of the crystalline state with a cubic lattice structure type NaCl. Determined that the TiC component with a strong covalent bond between the metal and the carbon increases the magnitude of the residual compressive stresses in the coating which, when a deposition temperature 530 K and the composition of 25 mol.% WC − 75 mol.% TiC reached − 7.7 GPa. It was determined that the nanocrystalline coatings Poisson’s ratio close to 0.24, and the coefficient of thermal expansion − 2⋅10−5 К−1.