Azarenkov, Mykola O., V.N. Karazin Kharkiv National University, Kharkiv, Ukraine; National Science Center «Kharkov Institute of Physics and Technology», Kharkiv, Ukraine, Ukraine
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East European Journal of Physics No. 4 (2023): East European Journal of Physics - Original Papers
Cathodic Vacuum ARC Multilayer Coatings (TiZrSiY)N/NbN: Structure and Properties Depending on The Deposition Interval of Alternate Layers
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