Deposition of Coatings of Tungsten and Two-Layer Copper-Tungsten Composition

  • S. Alimov V.N. Karazin Kharkiv National University, Kharkiv, Ukraine
  • Nikolay Azarenkov V.N. Karazin Kharkiv National University, Kharkiv, Ukraine
  • Valentyn Bobkov V.N. Karazin Kharkiv National University, Kharkiv, Ukraine
  • I. Okseniuk V.N. Karazin Kharkiv National University, Kharkiv, Ukraine
  • A. Skrypnyk V.N. Karazin Kharkiv National University, Kharkiv, Ukraine
  • Roman Starovoytov V.N. Karazin Kharkiv National University, Kharkiv, Ukraine
  • Lyudmila Tischenko V.N. Karazin Kharkiv National University, Kharkiv, Ukraine
Keywords: sputtering systems, multilayer coatings, tungsten films, copper films, adhesion


In the work a technology of tungsten films and two-layer copper-tungsten coatings deposition on stainless steel substrates was developed. The coatings were deposited by magnetron and arc sputtering of materials with condensation of them on the testing substrates. The deposition objects were probe of the ICRF antenna on fusion devices and reference samples, on which the properties of obtained coatings were studied. The possibility of tungsten coatings forming on long-length elements of functional blocs was considered.


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Alimov, S., Azarenkov, N., Bobkov, V., Okseniuk, I., Skrypnyk, A., Starovoytov, R., & Tischenko, L. (2013). Deposition of Coatings of Tungsten and Two-Layer Copper-Tungsten Composition. East European Journal of Physics, (1041(2), 116-123. Retrieved from