Influence of incident angle of ion beam on intrinsic stress in deposited coating

Abstract

In the model of the nonlocal thermoelastic peak of low energy ion, formula for intrinsic stress in the coating deposited from an inclined beam of ions in the modes of continuous and pulsed bias potential is obtained. It is shown that deformation of the coating by ion bombardment depends on the density of defects generated by primary ion minus those defects which are removed in the sputtering process. With the help of obtained formula the stress calculation is carried out for TiN coating deposited from beam of Ti ions in the pulse potential mode for different incident angles. Calculation shows that stresses at incident angles α ≠ 0 can be both less and more than stress arising at normal incidence of the ions, depending on the bias potential. Non-monotonic behavior of intrinsic stress with incidence angle increasing is established.

vacuum arc deposition; inclined ion beam; intrinsic stress