Effect of gas phase composition and glow discharge current on the growth kinetics of nitrogen-doped nanostructured diamond coatings

Abstract

The experimental results of investigations of the influence of the discharge current value and composition of the gas phase with a relatively low content of argon on the kinetics of the synthesis process in glow discharge plasma of nitrogen-doped nanostructured diamond coatings have been discussed. It was shown that under feeding of nitrogen into the gas phase by a corresponding decrease of hydrogen concentration the growth rate of nanostructured diamond coatings can increase or decrease depending on the relative concentrations of the gas phase components. The analysis and comparison of the experimental data with the available literature data of the gas phase composition, the discharge power (temperature) on the kinetics of diamond coating synthesis have been performed.