Physical formation of multiple, composite (multiphase) coatings obtained by ion-plasma methods

Abstract

This review article describes the laws of formation of multi­element and composite coatings obtained by means of ion­plasma methods. The effective methods to improve the properties of the coatings by doping them with transition metal elements have been considered. As the sputtered cathodes multielement composite materials have been considered. Physical and technological principles of ob tain ing new materials in the form of coatings with high physical and mechanical characteristics have be en suggested basing on the analysis of research results.