Nanodisperse films deposited by pulsed laser sputtering of combined Ni-Au targets

Abstract

The results of electron microscopic and electron diffraction investigation of Ni, Au and Ni-Au alloy films, which was prepared by pulse laser sputtering of the single-element and of the two-element metal targets, are presented. As a result of sputtering of single-element target of Ni and of the combined target of 0.75Ni-0.25Au on the substrates was formed films with metastable HCP structure. Sputtering of the combined targets of 0.5Ni-0.5Au, as well as a sputtering of targets of pure gold, results in formation of films with stable FCC structure.