Features of using the x-ray fluorescence analysis for determine the composition of vacuum-arc nitride coatings

Abstract

Features of the application of X-ray fluorescence (XRF) method to the study the chemical composition of thin multi-component nitride coatings are discussed. It was shown that the calculation of the concentration for thick coatings (∼10 µm) using the fundamental parameter method allows to estimate the ratio of metal components accurately. Using such a calculation for the analysis of thin layers in some cases leads to significant errors. Method of correcting the mass concentration on the thickness of the coating has been proposed to improve the accuracy of determining the composition. Results of experiments to determine the elemental composition of thin coatings (Ti, Al)N by XRF spectrometer “SprutVM” are given.