Influence of Parameters of Ion Deposition in Pulsed Mode on Characteristics of Diamondlike Coating
A pulsed mode of DLC coating deposition is theoretically investigated. In this mode a deposited ion flow of plasma environment with energy of E0 ~ (20÷200) eV is modified by superimposing of pulsed potential U ≤ 1000 V. . It was shown that intrinsic stress in a DLC coating can be decreased in several times without of essential decrease of sp3-bonded carbon concentration compared with DLC made in stationary mode deposition at E0ion energy. A method of optimization of pulsed mode parameters is proposed which is based on analysis of location of thermoelastic peaks of ions on phase P,T-diagram of carbon.
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