Influence of Parameters of Ion Deposition in Pulsed Mode on Characteristics of Diamondlike Coating

  • V. Vasylyev National Science Center “Kharkov Institute of Physics and Technology”, Kharkiv, Ukraine
  • Alexandr Kalinichenko National Science Center “Kharkov Institute of Physics and Technology”, Kharkiv, Ukraine https://orcid.org/0000-0002-5675-3947
  • Volodimir Strel’nitskij National Science Center “Kharkov Institute of Physics and Technology”, Kharkiv, Ukraine https://orcid.org/0000-0001-6047-6981
Keywords: DLC coating, plasma-based ion deposition, intrinsic stress, non-local thermoelastic peak

Abstract

A pulsed mode of DLC coating deposition is theoretically investigated. In this mode a deposited ion flow of plasma environment with energy of E0 ~ (20÷200)  eV is modified by superimposing of pulsed potential U1000 V. . It was shown that intrinsic stress in a DLC coating can be decreased in several times without of essential decrease of sp3-bonded carbon concentration compared with DLC made in stationary mode deposition at E0ion energy. A method of optimization of pulsed mode parameters is proposed which is based on analysis of location of thermoelastic peaks of ions on phase P,T-diagram of carbon.

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Published
2012-11-23
Cited
0 article
How to Cite
Vasylyev, V., Kalinichenko, A., & Strel’nitskij, V. (2012). Influence of Parameters of Ion Deposition in Pulsed Mode on Characteristics of Diamondlike Coating. East European Journal of Physics, (1025(4), 102-106. Retrieved from https://periodicals.karazin.ua/eejp/article/view/13679