On the diffusional mixing in Ag-Pd layered film system

Abstract

The formation of homogeneous solid solution in Ag-Pd layered film system with 60 nm layer thick was investigated by means of in situ TEM heating. The film system was formed by sequential deposition of components in vacuum on the substrate at room temperature. It has been shown that diffusion processes in the system under study were activated starting from a temperature 180 °С. These processes were completed at 350 °С and led to a total homogenization of the film system over its entire thickness.