Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2

Authors

  • I. N. Torianik V.N. Karazin Kharkiv National University
  • V. M. Beresnev V.N. Karazin Kharkiv National University
  • A. D. Pogrebnjak Sumy State University image/svg+xml
  • O. V. Sobol National Technical University “Kharkiv Polytechnic Institute”
  • Ye. V. Beresneva V.N. Karazin Kharkiv National University
  • I. A. Podcherniaieva I.N. Frantsevich Institute for Problems of Materials Science
  • A. Yu. Kropotov V.N. Karazin Kharkiv National University Scientific Center of Physical Technologies MES and NAS of Ukraine
  • N. G. Stiervoiedov V.N. Karazin Kharkiv National University
  • P. V. Turbin V.N. Karazin Kharkiv National University Scientific Center of Physical Technologies MES and NAS of Ukraine
  • D. A. Kolesnikov Belgorod National Research University image/svg+xml
  • S. S. Grankin V.N. Karazin Kharkiv National University
  • U. S. Nyemchenko V.N. Karazin Kharkiv National University
  • P. A. Srebniuk V.N. Karazin Kharkiv National University
  • V. Yu. Novikov Belgorod National Research University V.N. Karazin Kharkiv National University

Keywords:

ceramics, composite coatings, magnetron sputtering method, physical and mechanical properties

Abstract

By means of the magnetron sputtering method using the DC and pulsed voltages applied to the target, the coatings based on AlN-TiB2-TiSi2 ceramics were obtained. An amorphous-like structure of the obtained coatings was revealed. It had the area of ordering ~ 1 nm and the viscoplasticity coefficient of 0.07. The hardness of the coatings reaches 15.3 GPa, and the modulus of elasticity is 206 GPa. The coatings are characterized by high adhesion strength to the substrate.

 

 

Author Biographies

  • I. N. Torianik, V.N. Karazin Kharkiv National University
    с.н.с.
  • V. M. Beresnev, V.N. Karazin Kharkiv National University
    с.н.с.
  • A. D. Pogrebnjak, Sumy State University
    с.н.с.
  • O. V. Sobol, National Technical University “Kharkiv Polytechnic Institute”
    с.н.с.
  • Ye. V. Beresneva, V.N. Karazin Kharkiv National University
    с.н.с.
  • I. A. Podcherniaieva, I.N. Frantsevich Institute for Problems of Materials Science
    с.н.с.
  • A. Yu. Kropotov, V.N. Karazin Kharkiv National University Scientific Center of Physical Technologies MES and NAS of Ukraine
    с.н.с.
  • N. G. Stiervoiedov, V.N. Karazin Kharkiv National University
    с.н.с.
  • P. V. Turbin, V.N. Karazin Kharkiv National University Scientific Center of Physical Technologies MES and NAS of Ukraine
    с.н.с.
  • D. A. Kolesnikov, Belgorod National Research University
    с.н.с.
  • S. S. Grankin, V.N. Karazin Kharkiv National University
    с.н.с.
  • U. S. Nyemchenko, V.N. Karazin Kharkiv National University
    с.н.с.
  • P. A. Srebniuk, V.N. Karazin Kharkiv National University
    с.н.с.
  • V. Yu. Novikov, Belgorod National Research University V.N. Karazin Kharkiv National University
    с.н.с.

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Published

2017-07-21

Issue

Vol. 11 No. 3 (2013): Фізична інженерія поверхні

Section

Статті

License

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How to Cite

Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2. (2017). Journal of Surface Physics and Engineering, 11(3), 299-303. https://periodicals.karazin.ua/pse/article/view/8764

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