Structure and mechanical properties of zrn coatings formed by deposition of vacuum arc plasma fluxes

Abstract

ZrN coatings received by deposition of vacuum arc plasma fluxes are investigated. Results of rese  arches of influence of nitrogen pressure and substrate potential for coatings deposition rate, their me chanical properties, and also on structure and phase structure are given. In pressures area of 0,2— 6,65 Pa are observed substantial increase of coatings deposition rate, conditioned braking of ele ctro  nic component of plasma at collisions with the molecules of nitrogen. Coatings possess the high va lues of nanohardness (≈30 GPa) and Young’s modulus (≈400 GPa). At the increase of nitrogen pressure the diphasic state in coatings will be realized — along with cube stoichiometrical ZrN  (or even superstoichiometrical composition) X­ray amorphous zirconium nitride which composition Zr3N4 is added is present in coating.