Temperature dependence of the distribution of implanted ions Mo+ AND W+ IN DEPTH titanium alloy VT-6
Keywords:
implantation, ions, annealing distribution profiles of the elements titanium alloy VT-6Abstract
The influence of ion implantation of metals W+ andMo+in titanium alloys VT-6 on the phase composition of the surface layers. The broadening of the line α-Ti (101) indicates a trend of increasing deformation of the crystal lattice of α-Ti in the implantation of heavy ions W+ andMo+. The temperature dependence of ion distribution profilesMo+and W+ in the titanium alloy VT-6 during implantation dose 5 × 1017 sm–2 with an energy of 60 keV. After annealing at 823 K the main changes associated with the phase Al3Ti. The diffraction patterns observed an isolated peak (111) Al3Ti.
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2017-02-24
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Temperature dependence of the distribution of implanted ions Mo+ AND W+ IN DEPTH titanium alloy VT-6. (2017). Journal of Surface Physics and Engineering, 13(3), 406-410. https://periodicals.karazin.ua/pse/article/view/8035