Development of a mathematical model of an automated control system for depositing nanostructured dielectric slicks

Abstract

The article deals with the development of the mathematical model of an automated control system for the dielectric film production. The mathematical model being developed, the optimal control actions have been determined. The study of the film deposition and the optimality criterion selection has been made. The results of the calculations to optimize the technological process of film obtaining and the scheme of optimal control options are presented. It allows developing the mathematical model of the technological process of the dielectric film deposition.