Correlating Deposition Parameters with Structure and Properties of Nanoscale Multilayer (TiSi)N/CrN Coatings. East Eur. J. Phys. [Internet]. 2022 Jun. 2 [cited 2026 Oct. 25];(2):112-7. Available from: https://periodicals.karazin.ua/eejp/article/view/18538