Features of formation and effect of heating on the structure of Sb/В4С multilayer composition with the crystalline antimony layers

Abstract

Details of structure changes in the Sb/В4С multilayer composition with crystalline Sb layers under heating up to 450 °С are described. The Sb/В4С composition was made by magnetron sputtering and had layers’ thicknesses of 7 nm (Sb) and 8,5 nm (В4С). The research was conducted using X-ray diffractometry at small and large angles. Computer modeling of the small-angle diffractograms indicates the presence of mixed zones at borders between the layers of pure antimony and B4C. These mixed zones, with an inhomogeneous composition in thickness, delaminated and diminished substantially under heating. Amorphous state of the B4C layers and the initial crystalline texture of the Sb layers saved during annealing. The Sb/В4С multilayer periodic composition with a period of 15.6 nm, and with the layers of crystalline antimony, demonstrates the perfect stratified structure up to a temperature of 350 °С.