Effect of implantation by helium ions on the shape of the unit cell in the subsurface layers of GGG single crystals

Abstract

The transformation of the crystal lattice in ion-implanted layers of gadolinium gallium garnet single crystals was investigated. It was determined that the deformation of the crystal lattice in the implanted layer as a result of implantation by He+ ions occurs only in the perpendicular to the plane of plates direction, and unit cell reduces its symmetry from cubic to rhombohedral.