Structure, phase composition and growth model of amorphous W/Si multilayer X-ray mirrors deposited by magnetron sputtering

Authors

  • Ю. П. Першин Национальный технический университет «Харьковский политехнический институт»

Keywords:

multilayer X-ray mirror, amorphous coating, intermixing, density, composition

Abstract

By methods of X-ray diffractometry and relectometry (λ = 0.154 nm) the structure and phase composition of W/Si multilayer X-ray mirrors (MXMs) deposited with DC magnetron sputtering are studied. It is shown that as a result of component interaction during the deposition process asymmetric silicide interlayers are formed at interfaces of multilayer system. The adjacent interlayers within the MXM period differ both by composition and thickness. The densities of each layer are estimated. Model of W/Si MXM construction is proposed.

Author Biography

  • Ю. П. Першин, Национальный технический университет «Харьковский политехнический институт»
    Н. с.

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Published

2016-06-24

Issue

Vol. 1 No. 1 (2016): Журнал фізики та інженерії поверхні

Section

Статті

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How to Cite

Structure, phase composition and growth model of amorphous W/Si multilayer X-ray mirrors deposited by magnetron sputtering. (2016). Journal of Surface Physics and Engineering, 1(1), 27–41. https://periodicals.karazin.ua/pse/article/view/6091