Губарев АА. Influence of distribution of scattering in collision cascades of recoil atoms on pattern formation of amorphous si surface under irradiation of Ar ion with energy 1 keV. ЖФІП [Internet]. 2017Jul.28 [cited 2026Feb.1];11(1):46 -2. Available from: https://periodicals.karazin.ua/pse/article/view/8785