Torianik, I. N., V. M. Beresnev, A. D. Pogrebnjak, O. V. Sobol, Ye. V. Beresneva, I. A. Podcherniaieva, A. Yu. Kropotov, N. G. Stiervoiedov, P. V. Turbin, D. A. Kolesnikov, S. S. Grankin, U. S. Nyemchenko, P. A. Srebniuk, and V. Yu. Novikov. “Magnetron Sputtering of High Temperature Composite Ceramics AlN-TiB2-TiSi2”. Journal of Surface Physics and Engineering 11, no. 3 (July 21, 2017): 299 - 303. Accessed May 17, 2024. https://periodicals.karazin.ua/pse/article/view/8764.