Бажин, А. И., Троцан, А. Н., Чертопалов, С. В., Стипаненко, А. А., & Ступак, В. А. (2012). The influence of the magnetron sputtering regime and the composition of the reaction gas on the structure and properties of ITO films. Journal of Surface Physics and Engineering, 10(4), 342 - 349. Retrieved from https://periodicals.karazin.ua/pse/article/view/10074