[1]
Белоус, В.А., Лунёв, В.М., Носов, Г.И., Куприн, А.С., Толмачёва, Г.Н. and Колодий, И.В. 2017. Synthesis of TiSiN coatings by simultaneous sputtering of Ti and Si targets in nitrogen-argon plasma. Journal of Surface Physics and Engineering. 11, 4 (Jul. 2017), 412 - 419.