Stoichiometric Evolution of Multi-Phase Tungsten Nitrides under Variable Gas Flow and Auxiliary Plasma Assistance During Magnetron Sputtering. East Eur. J. Phys. [Internet]. 2026 Sep. 7 [cited 2026 Oct. 25];(3):681-8. Available from: https://periodicals.karazin.ua/eejp/article/view/30271