Cathodic Vacuum ARC Multilayer Coatings (TiZrSiY)N/NbN: Structure and Properties Depending on The Deposition Interval of Alternate Layers. East Eur. J. Phys. [Internet]. 2023 Dec. 2 [cited 2026 Oct. 25];(4):347-54. Available from: https://periodicals.karazin.ua/eejp/article/view/22643