Influence of the Inert Gas Pressure on Intrinsic Stress in Diamond-Like Coating Deposited From Vacuum Arc Carbon Plasma. East Eur. J. Phys. [Internet]. 2022 Jun. 2 [cited 2026 Oct. 25];(2):6-11. Available from: https://periodicals.karazin.ua/eejp/article/view/18466