Kutliev U, Ashirov A, Allayarova G, Saidova A. Studies of Implantation of O+ Ions into SiO2(001) Films at the Small-Angle Ion Bombardment. East Eur. J. Phys. [Internet]. 2025Jun.9 [cited 2025Dec.5];(2):320-3. Available from: https://periodicals.karazin.ua/eejp/article/view/25072