Beresnev VM, Lytovchenko SV, Azarenkov MO, Maksakova OV, Horokh DV, Mazilin BO, Kaynts D, Doshchechkina IV, GluhovОV. Cathodic Vacuum ARC Multilayer Coatings (TiZrSiY)N/NbN: Structure and Properties Depending on The Deposition Interval of Alternate Layers. East Eur. J. Phys. [Internet]. 2023Dec.2 [cited 2024Dec.22];(4):347-54. Available from: https://periodicals.karazin.ua/eejp/article/view/22643