Dudin SV, Yakovin SD, Zykov AV. The Effect of Plasma Activation of Reactive Gas in Reactive Magnetron Sputtering. East Eur. J. Phys. [Internet]. 2023Sep.4 [cited 2024Nov.21];(3):606-12. Available from: https://periodicals.karazin.ua/eejp/article/view/22255