kalinichenko AI, Kozionov SA, Perepelkin SS, Strel’nitskij VE. INTRINSIC STRESSES IN COATINGS DEPOSITED AT PLASMA IMMERSION ION IMPLANTATION. East Eur. J. Phys. [Internet]. 2015Mar.25 [cited 2024May6];1(4):57-3. Available from: https://periodicals.karazin.ua/eejp/article/view/1504