Vasylyev V, Kalinichenko A, Strel’nitskij V. Influence of Parameters of Ion Deposition in Pulsed Mode on Characteristics of Diamondlike Coating. East Eur. J. Phys. [Internet]. 2012Nov.23 [cited 2024Apr.26];0(1025(4):102-6. Available from: https://periodicals.karazin.ua/eejp/article/view/13679