Dudin, Stanislav V., Stanislav D. Yakovin, and Aleksandr V. Zykov. “The Effect of Plasma Activation of Reactive Gas in Reactive Magnetron Sputtering”. East European Journal of Physics, no. 3 (September 4, 2023): 606-612. Accessed December 8, 2023. https://periodicals.karazin.ua/eejp/article/view/22255.