kalinichenko, A. I., Kozionov, S. A., Perepelkin, S. S., & Strel’nitskij, V. E. (2015). INTRINSIC STRESSES IN COATINGS DEPOSITED AT PLASMA IMMERSION ION IMPLANTATION. East European Journal of Physics, 1(4), 57-63. https://doi.org/10.26565/2312-4334-2014-4-06